Piezo rotary motors

Piezo rotary motors | 'XRT-U'

Compact, fast, precise & durable

This is the XRT-U series. These rotary stages are driven by an ultrasonic piezo motor, offering you the best of both worlds:

1) The precision and compactness of a piezo rotary stage.
2) The lifetime and speed of an electromagnetic motor.

Enjoy!

Only 1 - 2 weeks lead time for most products.

Piezo rotary motors with built-in encoder


Height:8.9 ... 34 mm
Rotor diameter:27 ... 65 mm
Mass:25 ... 450 g
Resolution:109 ... 3 µrad (6250 ... 170 µ°)
Rotation range:> 360º (unlimited)
Max. speed:1080 °/s
Driving torque:9.5 ... 90 mNm*
Load capacity:0.1 ... 5 kg
Lifetime:> 1000 km / typ. 10 mill. rev.
Vacuum compatibility?Optional
Non-magnetic body?Optional. No magnetic field generation by default.

*Need more power? We offer special high-torque variants. Inquire to learn more.

Piezo rotary motors

Fast or slow - Everything is possible. Video shows actual speeds.

▼ View full specs

Select your piezoelectric rotary motor


Encoder resolution

Rotor diameter

Aperture

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Additional info


Dimensions: 50 x 46 x 21 mm

Load capacity: 1 g
Lifetime: > 10 million rev.

HV / UHV vacuum - optional ⓘ

Non magnetic - optional ⓘ

Pricing


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Stages - Click to zoom

Please contact us for a formal quote and volume discounts (QTY ≥ 10). Prices are indicative and subject to change without notice.

HV = High Vacuum   UHV = Ultra High Vacuum
NM = Non-Magnetic   CR = Cleanroom

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Controllers - Click to zoom

XD-C is PCB-only by default. €200 / $216 extra for desktop models.
* 2-Axis model. €300 / $324 for each additional axis, up to 6 axes.

 

Technical details


Piezo rotary motor
piezo rotary motor


Large volumes or custom designs? Explore our OEM solutions

 

 Compact, precise & fast


  • No loss of accuracy over time

  • Maintenance free

  • Non-magnetic & vacuum-compatible versions

  • Noiseless, direct-drive

  • Manually overridable without affecting lifetime

  • Low & safe voltage (<48V)

  • Capable of slow and constant scanning speeds

  • One-to-one interchangeability with other stage brands

Product videos




Made in Europe. Trusted globally.

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+ Over 500 NDA's

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The speed and precision of Xeryon’s products enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

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Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo stages to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufacturer

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At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer

    Compact & precise rotary motor | XRT-U


    The XRT-U is a compact and very precise rotation stage driven by an ultrasonic piezo rotary motor. With the XRT-U, you can achieve error motion values close to an air bearing rotary stage, but in a smaller volume and for a lower price.

    Compared to other piezo motor technologies, an ultrasonic piezo motor ensures you a non-degrading and vibration-free precision without generating any undesired dither motion during standstill. This makes the XRT-U a state-of-the-art piezo rotation stage for applications such as micro-CT scanners, metrology applications and vacuum and non-magnetic applications, such as electron microscopy.

    Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

    Frequently asked questions


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