XLS Original Series

The reference stage that put us on the map. In the meantime we have more precise stages available, but this one still does the job for many of our customers! 

Size: 34 x 13 mm
Travel range: 27 - 92 mm
Load capacity: < 1 kg
Resolution: 1.5 µm (= 1500 nm)
Lifetime: > 100 km

Stage length (mm):

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Compact & precise linear stage

The Xeryon Linear Stage (XLS) is a precise linear stage driven by a noiseless ultrasonic piezo motor. This allows fast positioning with micrometer precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, energy consumption and heat generation are considerably reduced. The integrated encoder has a resolution of 1.5 µm (=1500 nm).

Key features

Mechanical properties

Size: 34 x 13 mm
Travel range: 27 - 92 mm
Load capacity: < 1 kg
Blocking force: ~ 1 N
Traction force: ~ 1 N
Configuration: X, XY, XYZ


Speed: Several µm/s to 200 mm/s
Speed variation: +/- 1 % at typical scan speed
Sensor resolution: 1.5 µm (= 1500 nm)


All our stages are compatible with all of our controllers.
Software: windows interface and LabVIEW driver



XLS-1 dimensions


Product range overview

 Length (mm)Width (mm)Height (mm)Weight (g)Stroke (mm)Short cage stroke (mm)
XLS 40403413502728
XLS 50503413633238
XLS 60603413763748
XLS 70703413884257
XLS 808034131055062
XLS 10010034131267282
XLS 120120341315192102
All specifications are subject to change without notice.
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