XLS-1 Ultimate series

A top-class ultrasonic piezo stage with a 1 nm encoder resolution. For our most demanding customers. No compromises have been made for this stage. We also offer the option of a detailed measuring report of the complete motion specs of your specific stage.

Select stage length ⓘ :

Vacuum option:

Short cage option:

Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Load capacity: < 0.5 kg
Encoder resolution: 1 nm
Lifetime distance: > 100 km

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Compact & precise linear stage

The Xeryon Linear Stage (XLS) is a very precise linear stage driven by a ultrasonic piezo motor. This allows fast positioning with nanometer precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced. The integrated encoder has a resolution of 1 nm.

Technical information

Key features

Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision crossed-roller
Lifetime distance: > 100 km

Mechanical properties

Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Mass (w/o connector): 50 - 151 g

Load capacity: < 0.5 kg
Holding force: 1 N
Driving force: 1 N

Stage material: anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male

Motion performance (closed-loop)

Encoder type: optical, incremental
Grating period: 20 µm
Encoder resolution: 1 nm

Positioning resolution: 25 nm
 = min. step size
 = min. incremental motion

Bidir. repeatability: ± 50 nm

Max. speed: 200 mm/s
Min. speed: 2 to 5 µm/s
Speed stability: ± 1%

Error motion

Straightness/flatness error:  ± 1 - 2 µm
(depends on stage length)


Vacuum (10-6 mbar): -HV
Short cage option for increased stroke: -SC

Environmental compatibility

Temp. range: -20°C to +50°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation (motor only): < 1 W


Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.

A detailed description of the different technical terms can be found on the terminology page.

Product range overview

Stroke with
short cage (-SC)
w/o connector
All specifications are subject to change without notice.

Drawing XLS-1-

XLS-1 dimensions


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