XLS-1 Ultimate Precision Series

Compact piezo rotation stage with small error motions.

Size: 34 x 13 mm
Travel range: 27 - 92 mm
Load capacity: < 1 kg
Resolution: 10 nm
Lifetime: > 100 km

Stage length (mm):

Vacuum (mbar):

Short cage:

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Compact & precise linear stage

The Xeryon Linear Stage (XLS) is a precise linear stage driven by a noiseless ultrasonic piezo motor. This allows fast positioning with nanometre accuracy. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, energy consumption and heat generation are considerably reduced. The integrated encoder has a resolution of 10 nm.

Key features

Mechanical properties

Size: 34 x 13 mm
Travel range: 27 - 92 mm
Load capacity: < 1 kg
Blocking force: ~ 1 N
Traction force: ~ 1 N
Configuration: X, XY, XYZ


Speed: Several µm/s to 200 mm/s
Speed variation: +/- 1 % at typical scan speed
Sensor resolution: 10 nm


Compatible plug and play drivers: XD-U & XD-C
Software: windows interface and LabVIEW driver

Optional features

Vacuum capability
Specific size
Multi-DOF systems
Mounting features
Short cage


XLS-1 dimensions


Product range overview

 Length (mm)Width (mm)Height (mm)Weight (g)Stroke (mm)Short cage stroke (mm)
XLS 40403413502728
XLS 50503413633238
XLS 60603413763748
XLS 70703413884257
XLS 808034131055062
XLS 10010034131267282
XLS 120120341315192102
All specifications are subject to change without notice.