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XLS-1 Ultra-precision series

You are entering the limit of most ultrasonic piezo systems. All of the Xeryon advantages, but on an ultra-high precision level. Enjoy.

Select stage length ⓘ :

Vacuum option:

Short cage option:

Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Load capacity: < 0.5 kg
Encoder resolution: 78 nm
Lifetime distance: > 100 km

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Compact & precise linear stage


The Xeryon Linear Stage (XLS) is a very precise linear stage driven by an ultrasonic piezo motor. This allows fast positioning with nanometer accuracy. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced. The integrated encoder has a resolution of 78 nm.

Technical information


Key features

Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision crossed-roller
Lifetime distance: > 100 km

Mechanical properties

Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Mass (w/o connector): 50 - 151 g

Load capacity: < 0.5 kg
Holding force: 1 N
Driving force: 1 N

Stage material: anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male

Motion performance (closed-loop)

Encoder type: optical, incremental
Grating period: 20 µm
Encoder resolution: 78 nm

Positioning resolution: 80 nm
 = min. step size
 = min. incremental motion

Bidir. repeatability: ± 160 nm

Max. speed: 200 mm/s
Min. speed: 2 to 5 µm/s
Speed stability: ± 1%

Error motion

Straightness/flatness error:  ± 1 - 2 µm
(depends on stage length)


Options

Vacuum (10-6 mbar): -HV
Short cage option for increased stroke: -SC

Environmental compatibility

Temp. range: -20°C to +50°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation (motor only): < 1 W

Controller/software

Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.

A detailed description of the different technical terms can be found on the terminology page.

Product range overview


 Length
(mm)
Width
(mm)
Height
(mm)
Stroke
(mm)
Stroke with
short cage (-SC)
(mm)
Mass
w/o connector
(g)
XLS-1-40403413272850
XLS-1-50503413323863
XLS-1-60603413374876
XLS-1-70703413425788
XLS-1-808034135062105
XLS-1-10010034137282126
XLS-1-120120341392102151
All specifications are subject to change without notice.

Drawing XLS-1-


XLS-1 dimensions

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