Advantages of piezo technology
Xeryon offers a range of linear precision stages in different lengths and with many additional options. With travel ranges up to 100mm, the number of possible applications is endless. Thanks to the patented Crossfixx™ ultrasonic piezo technology, travel velocities of 200mm/s can be reached, making Xeryon linear precision stages the fastest nano-precision stages on the market.
Xeryon offers different levels of precision, from our High Precision range with a resolution of 0.3µm, up to our Ultra Precision range with a resolution of 78nm. For each model, additional options are available – for example, high vacuum compatibility, making the stage the perfect solution for your SEM or your vacuum chamber. With the optional extra small cage, we can get even more travel distance from our stages, driving the volume vs stroke ratio to the limit.
General piezo technology advantages
Ultrasonic piezo technology advantages
Fast point to point positioning
Low magnetic interference
Slow scanning speed
Low power consumption
Static holding force
Low voltage operation