Compact piezo rotation stage with a small error motion.

Encoder resolution: 109 µrad (22.5 arcsec or 6250 µ°)
Radial error motion: < 1 µm p-p
Axial error motion: < 0.5 µm p-p
Tilt (wobble): < 50 µrad p-p
Dimensions: 40 x 35 x 21 mm
Aperture: 7 mm
Load capacity: 0.5 kg
Vacuum or non-magnetic option
Lifetime: > 1 million rev.

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Compact & precise rotation stage

The XRT-U-30 is a compact and precise rotation stage driven by an ultrasonic piezo motor. With the XRT-U-30, you can achieve error motion values close to air bearing rotary stages, but in a smaller volume and for a lower price.

Compared to other piezo motor technologies, an ultrasonic piezo motor ensures you a non-degrading and vibration-free precision without generating any undesired dither motion in standstill. This makes the XRT-U a state-of-the-art rotation stage for applications such as micro-CT scanners, metrology applications and vacuum and non-magnetic applications, such as electron microscopy.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products! 

Technical information

Key features

Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision ball bearings
Lifetime: > 1 million rev.

Mechanical properties

Dimensions: 40 x 35 x 21 mm
Aperture: 7 mm
Mass (w/o connector): 82 g
Load capacity: 0.5 kg
Holding torque: 7 mNm
Driving torque: 14 mNm
Stage material: stainless steel AISI316 + anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male

Motion performance (closed-loop)

Encoder type: optical, incremental
Counts per revolution: 57600
Encoder resolution:
109 µrad (22.5 arcsec or 6250 µ°)

Positioning resolution:
125 µrad (25 arcsec or 7100 µ°)
 = min. step size
 = min. incremental motion (MIM)

Bidir. repeatability:
± 250 µrad (± 50 arcsec or ± 14200 µ°)

Max. speed: 720 °/s
Min. speed: 0.008 °/s
Speed stability: 1%

Radial error motion: < 1 µm p-p
Axial error motion: < 0.5 µm p-p
Tilt (wobble): < 50 µrad p-p

Environmental compatibility

Temp. range: -20°C to +50°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation: < 1 W


Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.


Vacuum (10-6 mbar): -HV
Non-magnetic bearings: -NM

A detailed description of the different technical terms can be found on the terminology page.
Learn more about the axes-of-rotation standard and error motion measurements on our technology page.


xrt-u 30 rotation stage dimensions

Error motion measurement (typical)


Product videos

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