Precision rotation stages

Compact and precise piezo rotation stages

Xeryon offers various piezo driven precision rotation stages. The error motion of our rotation stages is exceptionally small in the radial, axial and tilt direction. This makes our stages the most precise piezoelectric rotation stage on the market. The rotation angle is unlimited and can be controlled via the integrated optical encoder. This ensures an accurate closed-loop resolution and low repeatability.

You can choose between a stick-slip driven rotation stage (XRT-A) and an ultrasonic driven rotation stage (XRT-U). All our precision rotation stages can be customized to your needs and ordered for use in vacuum applications and/or made from non-magnetic materials.

Our selection of rotation stages

xrt-u 30 rotation stage

Ultrasonic Rotation Stage

Drive principle: ultrasonic piezo
Various encoder resolutions available

stick-slip rotation stage

Stick-slip Rotation Stage

Drive principle: stick-slip piezo
Encoder resolution:
109 µrad (22.5 arcsec or 6250 µ°)
Radial error motion: < 0.5 µm p-p
Dimensions: 40 x 31 x 15 mm
Aperture: 9 mm
Load capacity: 0.1 kg

Learn more about the terminology and various tests performed in order to specify the axis-of-rotation error motion of our piezo rotary stages on our technology page.