Precision rotation stages

Compact and precise piezo rotation stages

Xeryon offers various piezo driven precision rotation stages. The error motion of our rotation stages is exceptionally small in the radial, axial and tilt direction. This makes our stages the most precise piezoelectric rotation stage on the market. The rotation angle is unlimited and can be controlled via the integrated optical encoder. This ensures an accurate closed-loop resolution and low repeatability.

You can choose between a stick-slip driven rotation stage (XRT-A-25) and an ultrasonic driven rotation stage (XRT-U-30 or XRT-U-40). All our precision rotation stages can be customized to your needs and ordered for use in vacuum applications and/or made from non-magnetic materials.

Ultrasonic precision rotation stages


Compact high-speed piezo rotation stage with a small error motion.

Rotor diameter 32 mm

xrt-u 30 rotation stage

Original series: 109 µrad

Drive principle: ultrasonic piezo
Encoder resolution:
109 µrad (22.5 arcsec or 6250 µ°)
Radial error motion: < 1 µm p-p
Dimensions: 40 x 35 x 21 mm
Aperture: 7 mm
Load capacity: 0.5 kg

 

Rotor diameter 43 mm

xrt-u 30 rotation stage

Original series: 73 µrad

Drive principle: ultrasonic piezo
Encoder resolution:
73 µrad (15 arcsec or 4167 µ°)
Radial error motion: < 1 µm p-p
Dimensions: 50 x 46 x 21 mm
Aperture: 12.7 mm
Load capacity: 1 kg


xrt-u 40 ultra rotation stage

Ultra series: 3.49 µrad

Drive principle: ultrasonic piezo
Encoder resolution:
3.49 µrad (0.72 arcsec or 200 µ°)
Radial error motion: < 1 µm p-p
Dimensions: 50 x 46 x 21 mm
Aperture: 7 mm
Load capacity: 1 kg

Stick-slip precision rotation stages


Precise piezo rotation stage with the smallest error motion on the market.

Rotor diameter 28 mm

stick-slip rotation stage

Original series: 109 µ rad

Drive principle: stick-slip piezo
Encoder resolution:
109 µrad (22.5 arcsec or 6250 µ°)
Radial error motion: < 0.5 µm p-p
Dimensions: 40 x 31 x 15 mm
Aperture: 9 mm
Load capacity: 0.1 kg

 

Learn more about the terminology and various tests performed in order to specify the axis-of-rotation error motion of our piezo rotary stages on our technology page.