Precision Rotation Stages

Compact and precise piezo rotation stages

Xeryon offers various piezo driven rotation stages. The error motion of our rotation stages is exceptionally small in the radial, axial and tilt direction. This makes our stages the most precise piezoelectric rotation stage on the market. The rotation angle is unlimited and can be controlled via the integrated optical encoder. This ensures an accurate closed-loop resolution and low repeatability.

You can choose between a stick-slip driven rotation stage (XRT-A) and an ultrasonic driven rotation stage (XRT-U 30 or XRT-U 40). All our rotation stages can be customized to your needs and ordered for use in vacuum applications and/or made from non-magnetic materials.

Ultrasonic rotation stages


Compact high-speed piezo rotation stage with a small error motion.

xrt-u 30 rotation stage

XRT-U 30-109

Drive principle: ultrasonic
Encoder resolution: 109 µrad (22.5 arcsec)
Radial error motion: < 1 µm
Dimensions: 40 x 35 x 21 mm
Aperture: 7 mm
Load capacity: 0.5 kg

xrt-u 30 rotation stage

XRT-U 40-73

Drive principle: ultrasonic
Encoder resolution: 73 µrad (15 arcsec)
Radial error motion: < 1 µm
Dimensions: 50 x 46 x 21 mm
Aperture: 12.7 mm
Load capacity: 1 kg


xrt-u 40 ultra rotation stage

XRT-U 40-3

Drive principle: ultrasonic
Encoder resolution: 3.49 µrad (0.72 arcsec)
Radial error motion: < 1 µm
Dimensions: 50 x 46 x 21 mm
Aperture: 7 mm
Load capacity: 1 kg

 

Stick-slip rotation stages


Precise piezo rotation stage with the smallest error motion on the market.

stick-slip rotation stage

XRT-A

Drive principle: stick-slip
Encoder resolution: 109 µrad (22.5 arcsec)
Radial error motion: < 0.5 µm
Dimensions: 40 x 31 x 15 mm
Aperture: 9 mm
Load capacity: 0.1 kg

 

Learn more about the terminology and various tests performed in order to specify the axis-of-rotation error motion of our piezo rotary stages on our technology page.