XRT-A

XRT-A-25-109

This is the only non-ultrasonic piezo stage in our portfolio. We keep it because it's incredibly precise, extremely compact and lightweight. We also offer the option of a detailed measuring report of the complete motion specs of your specific stage.

Only 55 grams
Low radial error motion

Encoder resolution: 109 µrad (22.5 arcsec or 6250 µ°)
Radial error motion:  < 1 µm p-p (< 0.5 µm p-p with active compensation option)
Axial error motion: < 0.5 µm p-p
Tilt (wobble): < 50 µrad p-p
Dimensions: 40 x 31 x 15 mm
Aperture: 9 mm
Load capacity: 0.1 kg
Vacuum or non-magnetic option
Lifetime: > 100000 rev.

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Compact & precise rotation stage with active error motion compensation


The XRT-A is driven by a stick-slip piezo motor. With our patented bearing technology in the XRT-A, one can actively compensate the radial error motion to a nanometre-level, even during rotation. This makes the XRT-A unique and the most precise piezo rotation stage on the market.

With a radial error motion smaller than 0.5 µm, the XRT-A comes close to the error motion an air bearing stage without the need of pressurized air and a large volume, and this at an advantageous price. As a result, the XRT-A is the ideal solution for vacuum and magnetic applications where a precise rotation is required.

Technical information


Key features

Drive principle: stick-slip piezo motor
Bearings: integrated drive concept
Lifetime: > 100000 rev.

Mechanical properties

Dimensions: 40 x 31 x 15 mm
Aperture: 9 mm
Mass (w/o connector): 55 g
Load capacity: 0.1 kg
Stage material: stainless steel AISI316 + anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male


Motion performance (closed-loop)

Encoder type: optical, incremental
Counts per revolution: 57600
Encoder resolution:
109 µrad (22.5 arcsec or 6250 µ°)

Positioning resolution:
125 µrad (25 arcsec or 7100 µ°)
 = min. step size
 = min. incremental motion (MIM)

Bidir. repeatability:
± 250 µrad (± 50 arcsec or ± 14200 µ°)

Max. speed: 12 °/s
Min. speed: 0.012 °/s
Speed stability: 1%

Radial error motion: < 1 µm p-p
(< 0.5 µm p-p with active compensation option)
Axial error motion: < 0.5 µm p-p
Tilt (wobble): < 50 µrad p-p

Environmental compatibility

Temp. range: -20°C to +50°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation: < 1 W

Controller/software

Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.

Options

Active compensation of error motion: -AC
Vacuum (10-6 mbar): -HV
Non-magnetic materials: -NM

A detailed description of the different technical terms can be found on the terminology page.
Learn more about the axes of rotation standard and error motion measurements on our technology page.

Drawing


xrt-a rotation stage dimensions

Error motion measurement (typical)


XRT-A Error motion

Synchronous radial error motion with active compensation: 110 nm p-p
Synchronous radial error motion without active compensation: 360 nm p-p

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