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XRT-U Piezo Rotation Stage: Microradian Resolution, Unlimited 360° Rotation

XRT-U Piezo Rotation Stage

Microradian Resolution, Unlimited 360° Rotation
Microradian precision made simple with a built-in encoder, direct drive, and self-locking technology. No extra brakes or gears needed, saving you component costs and setup time. Configure your stage and get a quote in 24 hours.
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PRICING
Data Sheets & STEP
Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo
PRICING
Data Sheets & STEP
Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo

XRT-U Piezo Rotation Stage
Microradian Resolution,
Unlimited 360° Rotation

Microradian precision made simple with a built-in encoder, direct drive, and self-locking technology. No extra brakes or gears needed, saving you component costs and setup time. Configure your stage and get a quote in 24 hours.
REQUEST A QUOTE
PRICING
Data Sheets & STEP
Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo

ENCODER RESOLUTION

Down to 3 µrad

closed-loop

ROTATION RANGE

>360°

unlimited

SPEED RANGE

Up to 1080°/s

constant scanning

HOLDING TORQUE

Up to 90 mNm

config-dependent

ULTRA COMPACT

From 8.9 mm

stage height

LIFETIME

>500 km

travel distance

PIEZO ROTATION STAGES

Xeryon offers a complete range of rotation piezo stages, from the ultra-compact XRT-U-25 (8.9 mm high) to the high-torque XRT-U-60, all built on the Crossfixx™ ultrasonic drive platform. Available in five rotor sizes, with different apertures, encoder resolutions, and standard, high-vacuum (HV) or ultra-high-vacuum (UHV) versions. Configure yours below to see the exact specification and price; typical lead time is 2–4 weeks.

One drive does what normally takes three components

A precision rotary axis normally means a gearbox for torque, a brake to hold position, and a plan for the heat the motor puts into your instrument. The XRT-U piezo rotation stage replaces all three with one ultrasonic motor driving the rotor directly.

1080°/s
 vs. worm-gear rotation stages

Up to 12× faster than a geared stage — and smooth, where stick-slip creeps in jerky steps.

0 W
 vs. magnetic direct drives

Self-locking at rest, 9.5–90 mNm. No brake, no heat, no stray field.

Zero backlash  
vs. any geared stage

Direct drive — nothing to preload or re-shim, no repeatability lost to gear wear.
Self-locking (power off)
Closed-loop, built in encoder
Low heat dissipation
HV/UHV options
Zero magnetic field
See full comparison ↓
NEW

Introducing XRT-U-35

Our thinnest piezo rotation stage yet
22.5 mNm in a 9 mm-high housing. Higher torque, larger aperture, more load capacity — all in a compact footprint. The ultimate solution for space-constrained OEM integration.
CONFIGURE THE XRT-U-35
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Build your Piezo Rotation Stage

Stage Configurator & Pricing

Model

Encoder resolution

Vacuum compatibility

Need a custom aperture or cable length not listed? Contact us directly.

Your configuration
Rotation range>360° unlimited
Encoder resolution
Driving torque
Clear aperture
Max speed
Load capacity
Vacuum
Indicative price
Request a Quote View Detailed Specs

Ships in 2–4 weeks · Prices excl. controller & VAT

Product codeEncoderVacuumPrice (1 pc)

Swipe the table to see all columns →

Same model shown at every encoder resolution — your configuration is highlighted. Please contact us for a formal quote and volume discounts (QTY ≥ 10). Prices are indicative and subject to change without notice. HV = High Vacuum, UHV = Ultra High Vacuum. Prices shown are in Euros (€). We supply and ship globally.

A piezo rotation stage is a positioning device that uses a piezoelectric motor to rotate a payload around a single axis with microradian precision. Xeryon XRT-U piezo rotation stages extend this capability beyond the limited angular travel of conventional flexure-based designs, delivering unlimited continuous rotation beyond 360°, speeds from 0.004°/s scanning to 1080°/s, and closed-loop encoder resolution down to 3 µrad (0.62 arcsec).
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Full Specification

Everything you need to evaluate the XRT-U in your design. Download the spec sheet and STEP file to model it yourself.
DOWNLOAD SPECSHEET
DOWNLOAD STEP/ 3D FILES

Motion Performance (closed-loop)

Encoder resolutions — Gen 1

109 / 49 / 19 / 3 µrad (XRT-U-25 / -30 / -40 / -60)

Encoder resolutions — Gen 2

1000 / 100 / 3 µrad (XRT-U-35)

Encoder

Optical, incremental; one index per revolution

Minimum incremental motion

Down to 3 µrad (XRT-U-35) / 15 µrad (Gen 1); encoder-dependent

Bidirectional repeatability

Down to ±3 µrad (XRT-U-35) / ±30 µrad (Gen 1); encoder-dependent

Maximum speed

Down to ±3 µrad; model and encoder-dependent

Minimum speed

1080°/s

Min speed

0.004°/s for slow scanning

Speed stability

 1% typical (Gen 1); 10% (XRT-U-35)

Point-to-point positioning time

30 ms unloaded; 150 ms at 65 kg·mm² inertia (1° step, typical)

Error motion

Down to 1 µm radial, 0.5 µm axial and 50 µrad tilt/wobble

Mechanical & Environmental

Driving torque

9.5–90 mNm, configuration-dependent

Holding torque

9.5–90 mNm, configuration-dependent

Rotation range

>360° (unlimited)

Rotor diameter

27–65 mm

Clear aperture

6.35–25.4 mm

Dimensions (L × W × H)

37.5 × 30 × 8.9 mm to 70 × 70 × 38.6 mm

Mass

24–489 g, excluding connector

Payload limitation

0.1–5 kg; model-dependent

Lifetime

>500 km of motor travel / typically 10 million revolutions

Temperature range

−30 to +70°C

Vacuum versions

Standard / HV 10⁻⁶ mbar / UHV 10⁻⁹ mbar

Heat dissipation while moving

<1 W to <5 W depending on model; 0 W to hold position

Technical Resource Hub

Every XRT-U stage is self-locking when the power is off and provides quiet, maintenance-free operation from −30°C to +70°C without generating a magnetic field. High-vacuum and ultra-high-vacuum versions are available, and the stages can be combined easily with Xeryon linear or rotary stages for multi-axis setups.

Our XLS Piezo Linear Stages in Action

Piezoelectric linear stage
Linear piezo stage
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Ready to order — or still weighing your options?

Send us your configuration for a formal quote, or your angle, load, speed and resolution targets if you'd like us to spec it. Our motion engineers reply within 1 business day.

Send us your requirements or configuration for a formal quote. Our motion engineers reply within 1 business day.
Request a Quote
Book a Video Call

Why Engineers Choose Xeryon

Nine reasons the XRT-U replaces stacked, geared and electromagnetic axes

PRECISION YOU CAN TRUST

Coarse + fine motion in one
unlimited rotation and 3 µrad steps from a single drive — no stacked stages
 
Closed-loop control
an optical incremental encoder defines the accuracy, not the drive surface — no drift, no loss over lifetime
 
Low error motion
precision ball bearings bring it down to 1 µm radial, 0.5 µm axial and 50 µrad wobble, model-dependent

BUILT TO KEEP RUNNING

Maintenance-free
no lubrication, no service intervals
 
Direct drive, zero backlash
the motor turns the rotor directly — no gears to preload, re-shim or wear into lost motion
 
Manual override allowed
push the stage by hand without lifetime impact

DROPS INTO YOUR SYSTEM

Zero magnetic field generation
safe for e-beam and sensitive optics
 
Clear aperture 6.35–25.4 mm
route a beam, fibre or cable straight through the axis of rotation
 
Low voltage, 48–60 V
no high-voltage amplifier and no safety overhead around the stage
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At the Heart of Every XRT-U: the Crossfixx™ Ultrasonic Motor

Ultrasonic piezo, not stick-slip
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piezo element resonates 80–180 kHz, driving the slider through friction contact.

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continuous motion — not discrete jerky steps
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preloaded contact = passive holding force when unpowered
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closed-loop optical incremental encoder closes the position loop

At the heart of every XRT-U stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element resonating at 80–180 kHz drives the rotor directly through friction contact. No gears, so no backlash and no cogging torque through a revolution, and no travel limit: the XRT-U turns past 360° indefinitely, in either direction, down to 3 µrad increments.

The same preload holds the rotor when power is cut, 9.5 to 90 mNm of passive holding torque, no brake, no heat. Accuracy comes from the optical encoder, not the motor, so it holds over the rated >500 km / 10 million revolutions.

At the heart of every XLS stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element is excited at its resonance frequency (80–180 kHz, far above audible range), causing its tip to trace a microscopic elliptical trajectory. Pressed against the stage slider with a controlled preload, this vibration drives the slider forward in a smooth, continuous motion, fundamentally different from stick-slip (inertia) piezo drives, which advance in discrete jerky steps and are limited to low speeds.

Because the motor drives the slider directly through friction contact, there are no screws, gears or belts: zero backlash, no lubrication, no wear-related accuracy loss. The same preload makes the stage self-locking, when power is removed, the slider holds its position rigidly without generating heat or drift. A high-resolution optical encoder closes the position loop, so accuracy is defined by the encoder, not the motor, and remains stable over the >1000 km lifetime of the stage.

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At the heart of every XRT-U stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element resonating at 80–180 kHz drives the rotor directly through friction contact. No gears, so no backlash and no cogging torque through a revolution, and no travel limit: the XRT-U turns past 360° indefinitely, in either direction, down to 3 µrad increments.

The same preload holds the rotor when power is cut, 9.5 to 90 mNm of passive holding torque, no brake, no heat. Accuracy comes from the optical encoder, not the motor, so it holds over the rated >500 km / 10 million revolutions.

World's smallest ultrasonic crossfixx piezo motor

At the heart of every XRT-U stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element resonating at 80–180 kHz drives the rotor directly through friction contact. No gears, so no backlash and no cogging torque through a revolution, and no travel limit: the XRT-U turns past 360° indefinitely, in either direction, down to 3 µrad increments.

The same preload holds the rotor when power is cut, 9.5 to 90 mNm of passive holding torque, no brake, no heat. Accuracy comes from the optical encoder, not the motor, so it holds over the rated >500 km / 10 million revolutions.

Choosing a Rotary Stage: How the Technologies Compare

Ultrasonic piezo vs. stick-slip, worm gear, magnetic direct drive and air bearing
Features
Xeryon's ultrasonic piezo: XRT-U
Stick-slip piezo
Worm gear
Magnetic direct drive
Air Bearing
Error motion (wobble)
down to 50 µrad
bearing-dependent
arcsec-level with lapped worm
low, bearing-dependent
good
Size & integration
compact, direct drive
compact
bulky gearbox
larger, more electronics
large, needs air supply
Speed range
0.004–1080°/s
low, duty-cycle limited
low to moderate, ~90°/s typical
high
high
Hold position (power off)
yes, 9.5–90 mNm self-locking

yes

yes, self-locking
no, needs brake or power
no
Backlash
none — direct drive

none

preload keeps it low; returns as teeth wear
none
none
Magnetic field generation

none

none

none

yes

none
Maintenance
maintenance-free
slip wear over duty cycles
gear wear, re-shimming
low
filtration and air supply

Where each one wins: air bearings are unmatched on error motion, but they are large, costly and dependent on clean compressed air. Worm gears give high torque and self-locking behaviour cheaply and hold off-centre loads well; but they are slow, not back-drivable, and their anti-backlash preload needs re-adjusting as the teeth wear. Magnetic direct drives are the fastest option, at the cost of size, price, standby power and a stray field. Stick-slip piezo is compact and fine-resolution, but the repeated slip limits speed and lifetime under high duty cycles.

The XRT-U sits where those trade-offs meet: the speed of a direct drive with the compactness and holding torque of a piezo stage, no magnetic field, no gearbox and no air supply. If that is the balance your axis needs, configure your stage above; or send us your angle, load and resolution targets and we will size it with you

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Not sure if an ultrasonic piezo rotary drive is right for your application?

Send us your angle, load, speed and resolution targets. Our motion engineers will tell you straight whether the XRT-U fits — and say so if it doesn't.
REQUEST A QUOTE
BOOK A VIDEO CALL
Reply within 1 business day

Where Our Ultrasonic Stages Make the Real Difference

Key Industries and Applications

Semicon

Wafer theta alignment, die bonding & mask alignment in vacuum

Lasers & Spectroscopy

Beam steering, fiber alignment & sample scanning

Quantum Computing

UHV-compatible positioning of qubit optics

metrology

Coordinate measuring machines (CMMs), Multi-Angle Inspection
VIEW MORE

Made in Europe. Trusted Globally

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Xeryon fills a niche we haven’t seen anywhere else. The combination of high dynamics, integrated encoder and holding force in such a lightweight, long-stroke actuator is unmatched. Any alternative would require multiple components and still fall short in accuracy and stability.

Chief Technology Officer

High-throughput tissue engineering company

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The speed and precision of Xeryon’s actuators enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

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Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo actuators to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufacturer

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At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to downsize our design and build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer

    Frequently Asked Questions

    A piezo rotation stage is a compact motion platform used for precise angular positioning in space-constrained systems. Xeryon's XRT-U is a miniature piezo rotation stage driven by Xeryon's Crossfixx™ ultrasonic motor, combining the precision and compactness of piezo technology with high speed, unlimited rotation and durability.

    The XRT-U is designed for fast positioning with microradian precision and can hold its angle when powered off thanks to its self-locking piezo motor. The series is available with different rotor sizes, apertures, encoder resolutions, and optional high-vacuum or ultra-high-vacuum compatibility.

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