XRT Ultrasonic Rotation Stage

This is the XRT-U series. These rotation stages all contain an ultrasonic piezo-motor, offering you the best of both worlds: the lifetime and speed of an electro-magnetic motor, with the compactness of a piezo-system. Enjoy!

Combine any of the specs below to select the perfect product for you!

Select encoder resolution:

*An external position encoder can still be connected to the controller.

Rotor diameter:



HV/UHV vacuum option:

Non-magnetic option ⓘ :

Vacuum feedthrough connector:

Dimensions: 50 x 46 x 21 mm
Load capacity: 1 g
Lifetime: > 1 million rev.

Xeryon product code:

1 - 2 weeks leadtime for most products !

Compact & very precise rotation stage

The XRT-U is a compact and very precise rotation stage driven by an ultrasonic piezo motor. With the XRT-U, you can achieve error motion values close to an air bearing rotary stage, but in a smaller volume and for a lower price.

Compared to other piezo motor technologies, an ultrasonic piezo motor ensures you a non-degrading and vibration-free precision without generating any undesired dither motion during standstill. This makes the XRT-U a state-of-the-art rotation stage for applications such as micro-CT scanners, metrology applications and vacuum and non-magnetic applications, such as electron microscopy.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Technical information

Key features

Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision ball bearings
Lifetime: > 1 million rev.

Mechanical properties

Dimensions: 50 x 46 x 21 mm
Aperture: 12.7 mm
Mass (w/o connector): 130 g
Load capacity: 1 g
Holding torque: Loading...
Driving torque: Loading...
Stage material: stainless steel AISI316 + anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male or optional LEMO connector

Motion performance (closed-loop)

Encoder type: optical, incremental
Encoder resolution:
3.49 µrad (0.72 arcsec or 200 µ°)

Positioning resolution:
25 µrad
 = min. step size
 = min. incremental motion

Max. speed: 720 °/s
Min. speed: 0.008 °/s
Speed stability: 1%

Radial error motion: < 1 µm p-p
Axial error motion: < 0.5 µm p-p
Tilt (wobble): < 50 µrad p-p

Environmental compatibility

Temp. range: -30°C to +70°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation: < 1 W


Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.


Vacuum (10-6 mbar): -HV
Non-magnetic bearings: -NM

A detailed description of the different technical terms can be found on the terminology page.
Learn more about the axes of rotation standard and error motion measurements on our technology page.


xrt-u 40 rotation stage dimensions

Error motion measurements (typical)


Product videos

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