Metrology

Xeryon's products are widely used in metrology devices as they are designed for precision, speed and high reliability. An overview of their applications:

Example applications

Coordinate measuring machines (CMMs)
Industrial microscopy
Optical (3D) metrology (scanning, testing, measuring)
CT and X-Ray scanners
Wafer handling and alignment
Portable scanners
Laser tracker systems
Microwave measurements
And many more...

Precision & speed

Xeryon's stages and actuators are the market's fastest piezo motion products. Positioning up to 1 nanometer with 400 mm/s or 720 °/s and very low settling times (as low as 20 ms) make our products highly suitable for a wide range of metrology applications.

Zero backlash

Xeryon's products are all direct-drive, resulting in a simple, reliable design with backlash-free operation. Compared to other types of piezo motors, Xeryon's ultrasonic piezo motors last more than ten times as long.

Silent, agile and manually overridable

Due to their design, Xeryon's products are self-locking, meaning they hold their position when not powered, and backdrivable, so they can be overridden manually if so wished. In addition, our stages and actuators operate very quietly, in contrast to traditional piezo motion products.

Made in Europe. Trusted globally.

Xeryon fills a niche we haven’t seen anywhere else. The combination of high dynamics, integrated encoder and holding force in such a lightweight, long-stroke actuator is unmatched. Any alternative would require multiple components and still fall short in accuracy and stability.

Chief Technology Officer

High-throughput tissue engineering company

The speed and precision of Xeryon’s actuators enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo actuators to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufacturer

At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to downsize our design and build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer