
XY and XYZ Piezo Stages
Easily combine linear & rotary piezo stages
Most of our linear and rotary stages can be mounted into an XY stage, XYZ stage, or other combination with ease.
Simply select your:
- X and Y axes from our linear stages;
- Z axis from our vertical stages;
- Rotational axes from our rotational stages.
Any combination is possible, including 4-, 5- or 6-axis stages.
Check out our stages combination guide to see the possibilities.
Only 1 - 2 weeks lead time for most products.
Precision XY, XYZ, XTheta or XYTheta stages
Compact:
Starting at a mass of less than 40 grams per stage
Precise:
Resolutions of up to 5 nm (linear) and 3 µrad (rotary)
Fast:
Up to 1000 mm/s (linear) and 720°/s (rotary)
Durable:
Lifetime > 1000 km (linear) and > 10 million revolutions (rotary)
Large volumes or custom designs? Explore our OEM solutions

All machining, assembly and quality control done in Belgium, Europe
Self-locking:
Positional stability, even when powered off
Fast point-to-point positioning:
Positioning frequency up to 50 Hz
Versatile:
Vacuum-compatible and non-magnetic versions available for all stages
Low-voltage:
Stages operate at < 48V
Compatible:
One-to-one interchangeability with other stage brands
Select the stages for your multi-axis setup here:
Or talk to our integration engineers:
Prices depend on precision level, length / diameter, force and optional features.
Most stages cost between $1300 and $2100 per axis.
Most controllers between $800 (single-axis) and $2600 (multi-axis benchtop model).
XYZ setup including controller starts at $6500.
For full pricing info, please navigate to the respective product pages.
Lead time just 1 - 2 weeks for most products.
Applied industries (examples)
Technical details

Xeryon's stages are modular, allowing for easy multi-axis configurations
Compact, precise & fast
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No wear-induced play (no loss of accuracy over time)
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Maintenance free
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No magnetic field generation
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Direct-drive, no bulky gears or other transmission components
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Back-drivable (manually overridable without affecting lifetime)
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Low & safe voltage (<48V)
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Low power consumption
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Capable of slow and constant scanning speeds

Xeryon's Crossfixx™ motor marks a breakthrough in motion control. Read why.
Product videos
Piezo XY and XYZ stages by Xeryon
Our precision stages can be combined into different configurations such as XY, XYZ XTheta or XYTheta. The matching mounting hole patterns of our different stages make it very easy to build any configuration without the use of custom adapter plates. Anything is possible, from a single axis setup to four-, five-, or even six-axis motorised stage setups.
These multi-axis setups allow you to position with nanometer precision and repeatability in multiple degrees of freedom, such as XY stages and XYZ stages. Thanks to the ultrasonic piezo drive technology of the individual stages, your multi-axis setup will have a long lifetime, position fast and noiseless and holds its position when powered off. One can even move at very low and constant speeds (µm/s).
These features make it the perfect microscope stage or multi-axis sample stage for material science applications. All of our stages can be used in vacuum. Have a look at the specs of our individual stages for more information.
Full measurement reports are available upon request.
Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!
Frequently asked questions
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