XY and XYZ Piezo Stages
Easily combine linear & rotary piezo stages
Most of our linear and rotary stages can be mounted into an XY stage, XYZ stage, or other multi-DOF combination with ease.
Simply select your:
- X and Y axes from our linear stages;
- Z axis from our vertical stages;
- Rotational axes from our rotational stages.
Any combination is possible, including 4-, 5- or 6-axis stages.
Check out our stages combination guide to see the possibilities.
Only 1 - 2 weeks lead time for most products.
Precision XY, XYZ, XTheta or XYTheta stages
Compact:
Starting at a mass of less than 40 grams per stage
Precise:
Closed-loop resolutions down to 5 nm (linear) and 3 µrad (rotary)
Fast:
Up to 200 mm/s (linear) and 720°/s (rotary)
Durable:
Lifetime > 1000 km (linear) and > 10 million revolutions (rotary)
Large volumes or custom designs? Explore our OEM solutions
Self-locking:
Positional stability, even when powered off
Fast point-to-point positioning:
Positioning frequency up to 50 Hz
Versatile:
Vacuum-compatible and non-magnetic versions available for all stages
Low-voltage:
Stages operate at < 48V
Compatible:
One-to-one interchangeability with other stage brands
Select the stages for your multi-axis setup here:
Or talk to our integration engineers:
Prices depend on precision level, length / diameter, force and optional features.
Most stages cost between $1300 and $2100 per axis.
Most controllers between $800 (single-axis) and $2600 (multi-axis benchtop model).
XYZ setup including controller starts at $6500.
For full pricing info, please navigate to the respective product pages.
Lead time just 1 - 2 weeks for most products.
Applied industries (examples)
Technical details
Xeryon's stages are modular, allowing for easy multi-axis configurations
Made in Europe. Trusted globally.
+ Over 500 NDA's
The speed and precision of Xeryon’s products enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.
Director of R&D
Fluorescence microscope manufacturer
Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo stages to be much more durable than the ones we used before.
Senior Optomechanical Designer
Ultrafast laser source manufacturer
At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.
Principal Mechanical Engineer
Leading semiconductor test equipment manufacturer
Compact, precise & fast
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No wear-induced play (no loss of accuracy over time)
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Maintenance free
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No magnetic field generation
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Direct-drive, no bulky gears or other transmission components
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Back-drivable (manually overridable without affecting lifetime)
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Low & safe voltage (<48V)
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Low power consumption
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Capable of slow and constant scanning speeds
Xeryon's Crossfixx™ motor marks a breakthrough in motion control. Read why.
Product videos
Piezo XY and XYZ stages by Xeryon
Our precision stages can be combined into different configurations such as XY, XYZ XTheta or XYTheta. The matching mounting hole patterns of our different stages make it very easy to build any configuration without the use of custom adapter plates. Anything is possible, from a single axis setup to four-, five-, or even six-axis motorised stage setups.
These multi-axis setups allow you to position with nanometer precision and repeatability in multiple degrees of freedom, such as XY stages and XYZ stages. Thanks to the ultrasonic piezo drive technology of the individual stages, your multi-axis setup will have a long lifetime, position fast and noiseless and holds its position when powered off. One can even move at very low and constant speeds (µm/s).
These features make it the perfect microscope stage or multi-axis sample stage for material science applications. All of our stages can be used in vacuum. Have a look at the specs of our individual stages for more information.
Full measurement reports are available upon request.
Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!
Frequently asked questions
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