Precision XY Stages

Compact and modular XY-stage with ultrasonic piezo motors

Size: 40-120 x 40-120 x 26 mm
Load capacity: < 1 kg
Resolution: 78 nm (P) or 310 nm (S)
Vacuum: 10-6 mbar
Lifetime: > 100 km

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Nanometre precise XY stage

The XY-XLS consists of two XLS stages stacked on top of each other without the use of an extra adapter plate. With the XY-XLS one can position in 2-DOF with nanometre precision and repeatability. Because of the ultrasonic drive principle of the XLS stage, the XY-XLS has a long lifetime, fast, noiseless and holds its position when powered off. One can even move at very low and constant speeds (µm/s).

These features makes it the perfect microscope stage or multi-DOF positioner for material science applications. The XY-XLS can be used in vacuum and made from non-magnetic materials.

Key features

Mechanical properties

Size: 40-120 x 40-120 x 26 mm
Travel range: 27-107 x 27-107 mm
Load capacity: < 1 kg
Blocking force: ~ 1 N
Traction force: ~ 1 N
Configuration: XY, XYZ

* Optional


Speed: Several µm/s to 200 mm/s
Speed variation*: +/- 1 % at typical scan speed
Sensor resolution: 78 nm (P), 310 nm (S)


Compatible plug and play drivers: XD-M
Software: windows interface and LabVIEW driver

Optional features

Vacuum capability
Active compensation
Specific size
Multi-DOF systems
Mounting features

Product video