Piezo linear stage

Linear piezo stages | 'XLS'


The XLS series piezo linear stages are driven by our Crossfixx ultrasonic motor, giving you the best of both worlds:

1) The precision and compactness of piezo
2) Amazing speed, travel and durability

All of our stages can easily be combined into a multi-axis setup and are available as vacuum-compatible or non-magnetic versions. Enjoy!

Only 1 - 2 weeks lead time for most products.

Micro linear stage with built-in encoder


Height:13 ... 16.8 mm
Width:34 ... 47.6 mm
Mass:40 ... 241 g
Travel range:10 ... 110 mm
Resolution:1.25 µm ... 5 nm
Max. speed:200 mm/s
Max. positioning freq.:50 Hz
Driving force (= holding force):1 ... 5 N
Lifetime:> 1000 km / typ. 20 mill. cycles
Vacuum compatibility?Optional
Non-magnetic body?Optional. No magnetic field generation by default.

Piezo XY stage

Precise, fast, compact. Holds position when powered off.

▼ View full specs

Piezo, but different


Ultrasonic piezo motors are relatively unknown. They're precise and small, but offer high speed and long travel, unlike traditional piezo motors.

Recently, Youtuber 'Know Art' visited Xeryon in his search to better understand precision mechanics, and by extension, piezo.

The result?

A deep dive into high-precision motion, and a great breakdown of our revolutionary technology.

Select your linear piezo stage


Driving force

Stage length

= Travel range:

27 - 92 mm

Encoder resolution

HV / UHV vacuum - optional 

Non magnetic - optional 

Short cage - 80 mm model only

Dimensions:

30 - 120 x 34 x 13 mm

Pricing


Xeryon - XLS - Pricing 2025

Stages

Please contact us for a formal quote and volume discounts (QTY ≥ 10). Prices are indicative and subject to change without notice.

HV = High Vacuum   UHV = Ultra High Vacuum
NM = Non-Magnetic   CR = Cleanroom

 

Xeryon - XLS Controllers - Pricing 2025

Controllers

XD-C is PCB-only by default. €200 / $216 extra for desktop model.
* 2-Axis model. €300 / $324 for each additional axis, up to 6 axes.
** Additional motherboard required. Ask sales for details.

Technical details


Piezoelectric linear stage

Xeryon stages are modular, allowing for easy multi-axis configurations

Compact, precise & fast


Linear piezo stage


Our high-speed stages allow for both coarse & fine motion in one. How it works.

 

  • Coarse & fine positioning in one

  • No loss of accuracy over time

  • Maintenance free

  • No magnetic field generation

  • Direct-drive

  • Manually overridable without affecting lifetime

  • Low & safe voltage (<48V)

  • Low power consumption

  • Capable of slow and constant scanning speeds

  • Optional extreme precision guideways available upon request

More videos


Trusted by numerous industry leaders

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+ Over 500 NDA's

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The speed and precision of Xeryon’s products enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

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Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo stages to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufucturer

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At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer

    Ultrasonic linear piezo stage | XLS


    The XLS is a precise linear stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced.

    The XLS is the fastest linear stage of such a small size in the world.

    Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

    Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

    Frequently asked questions


    Can't find what you're looking for?

    Apologies! Send us your question and we will get back to you quickly. We promise.

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