ENCODER RESOLUTION
Down to 5 nm
closed-loopTRAVEL RANGE
10-110 mm
configurableSPEED RANGE
5 µm/s – 200 mm/s
constant scanningPAYLOAD
0.5-1.5 kg
config-dependentULTRA COMPACT
From 13 mm
stage heightLIFETIME
>1000 km
travel distancePIEZO LINEAR STAGES
One drive does what normally takes three components
Nanometer resolution normally means stacking a fine axis on a coarse one, adding a brake to hold position, and managing motor heat. The XLS linear piezo stage does all three with one ultrasonic motor.70x the stroke
110 mm of travel, where flexure piezo stages stop at 1.5 mm20x faster, and smooth
200 mm/s continuous, where stick-slip drives jerk along at 10 mm/s0W to hold position
Self-locking at rest, where electromagnetic stages need power, a brake, and shed heatBuild your Piezo Linear Stage
Stage Configurator & PricingSeries / driving force
Stage length
Encoder resolution
Vacuum compatibility
Need a short cage on another length or a custom cable length? Contact us directly.
| Travel range | |
| Dimensions (L×W×H) | |
| Load capacity | |
| Mass of the stage | |
| Max speed | |
| Indicative price |
Ships in 2–4 weeks · Prices excl. controller & VAT
| Product code | Travel | Resolution | Vacuum | Price (1 pc) |
|---|
Same stage shown at every encoder resolution — your configuration is highlighted. Prices are indicative and subject to change; contact us for a formal quote and volume discounts (QTY ≥ 10). We supply and ship globally.
A linear piezo stage is a positioning device that uses a piezoelectric motor to move a slider along a single axis with nanometer precision. Xeryon XLS linear piezo stages extend this capability beyond the sub-millimeter travel of conventional flexure-based designs, delivering up to 110 mm of travel, speeds ranging from low-speed micrometer-per-second scanning to 200 mm/s, and closed-loop encoder resolution down to 5 nm.
Full Specification
Everything you need to evaluate the XLS in your design. Download the spec sheet and STEP file to model it yourself.Motion Performance (closed-loop)
Positioning resolution
Encoder
Bidirectional repeatability
Max Speed
Min speed
Speed stability
Payload
Mechanical & Environmental
Driving force
Travel range
Dimensions (L × W × H)
Mass
Lifetime
Temperature range
Vacuum versions
Ready to order — or still weighing your options?
Why Engineers Choose Xeryon
Nine reasons the XLS replaces stacked, geared and electromagnetic axesPRECISION YOU CAN TRUST
BUILT TO KEEP RUNNING
DROPS INTO YOUR SYSTEM
At the Heart of Every XLS: the Crossfixx™ Ultrasonic Motor
Ultrasonic piezo, not stick-slip
piezo element resonates 80–180 kHz, driving the slider through friction contact.



Why Engineers Move Away from Stick-Slip and Electromagnetic Stages
Ultrasonic Piezo vs. Stick Slip vs. Electromagneticsmooth, stable velocity
jerky micro-steps
smooth
yes, self-locking
yes
no, needs brake/power
none
none
continuous
none
none
yes
silent (80–180 kHz)
audible clicking
silent
compact, direct drive
compact
bulky + cabling
Choosing between linear piezo stage technologies? Flexure-guided piezo stages offer sub-nanometer resolution but only ≤1.5 mm travel; stick-slip (inertia) drives travel further but move in slow, jerky steps. Ultrasonic resonant drives like the XLS deliver the speed of an electromagnetic stage with the precision, holding force and compactness of a piezo drive, without the magnetic fields, heat or bulky cabling.
Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!
Not sure the ultrasonic drive is right for your axis?
Send us your travel, load and resolution targets. Our motion engineers will tell you straight whether the XLS fits — and say so if it doesn't.
Where Our Ultrasonic Stages Make the Real Difference
Key Industries and ApplicationsMade in Europe. Trusted Globally
Video Gallery
Frequently Asked Questions
A linear piezo stage is a compact motion platform used for precise linear positioning in space-constrained systems. Xeryon's XLS is a miniature linear piezo stage driven by Xeryon's Crossfixx™ ultrasonic motor, combining the precision and compactness of piezo technology with high speed, long travel, and durability.
The XLS is designed for fast positioning with submicron precision and can hold position when powered off thanks to its self-locking piezo motor. The series is available with different travel ranges, encoder resolutions, driving forces, and optional high-vacuum or ultra-high-vacuum compatibility.
Learn more about different types of Mini or Micro Linear Piezo Stages here.
Can't find what you're looking for?
Apologies! Send us your question, and we will get back to you quickly. We promise.














