Linear piezo stages | XLS

Compact, fast, precise & durable

This is the XLS series. These piezo linear stages are driven by our Crossfixx™ ultrasonic motor, giving you amazing durability and speed, with the precision and compactness of a piezo system.

All of our stages can easily be combined into a multi-axis setup and are available as non-magnetic or vacuum-compatible versions. Enjoy!

Only 1 - 2 weeks lead time for most products.

Compact & precise linear stage

Compact

Starting at a mass of less than 40 grams

Precise

Resolutions between 1.25 µm and 1 nm (open loop also available)

Fast

Up to 200 mm/s in closed-loop, 1000 mm/s open-loop (minimum: 1 µm/s)

Durable

Lifetime > 1000 km or 20 million cycles

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Actual speed. As you can see, this is not your average piezo stage. How it works.

Large volumes or custom designs? Explore our OEM solutions

Quick

Stroke frequency up to 50 Hz

Smooth

1N, 3N and 5N direct-drive ultrasonic piezo motors

Strong

Load capacity up to 2000 grams

Versatile:

Non-magnetic and vacuum-compatible versions available

Compatible:

One-to-one interchangeability with other stage brands

Select your linear piezo stage

Driving force

*3N and 5N motors not available for the 30 mm variant

Stage length

= Travel range:

27 - 92 mm

Encoder resolution

HV / UHV vacuum - optional ⓘ

Short cage - optional ⓘ

Non magnetic - optional ⓘ

Dimensions:

30 - 120 x 34 x 13 mm

Product code:

XLS-1-40-1250

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Price indications:

Single axis example: XLS-3-40-1250 + single-axis controller ≈ €2100 / $2300
XYZ setup example: 2x XLS-3-40-1250 (XY) + 1x XVS-3-40-1250 (Z) + three-axis controller ≈ €6500 / $7050
Prices depend on precision level, length, driving force and optional features.
Lead time just 1 - 2 weeks for most products. Evaluation kits available for all of our products.

All of our stages can easily be combined into multi-axis systems (linear & rotary)

Compact, precise & fast

Coarse & fine positioning in one
No wear-induced play (no loss of accuracy over time)
Maintenance free
No magnetic field generation
Direct-drive, no bulky gears or other transmission components
Back-driveable (manually overridable without affecting lifetime)
Low & safe voltage (<48V)
Low power consumption
Capable of slow and constant scanning speeds
Optional extreme precision guideways available upon request

Technical details

Specs XLS-1-series* (1N model)

Specs XLS-3-series* (3N model)

Specs XLS-5-series* (5N model)

*Optional guideways for extreme precision are available upon request for improved straightness, flatness, pitch, yaw & roll error motions.

Controller & connection manual (all models)

Stages combination guide (all models)

For detailed explanations of terminology used in specification sheets, take a look at our selection guide.

Full measurement reports available upon request.

Non-magnetic

1. None of Xeryon's products generate a magnetic field, thanks to the absence of copper windings or magnets.

2. Xeryon stages can be made without any ferromagnetic materials, making them usable in magnetic fields up to 10T ('Full non-magnetic' option).

For fluctuating magnetic fields, we offer reinforced PEEK plates in order to minimize unwanted eddy current formation.

Vacuum compatibility

Xeryon's stages are available as high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-9 mbar) variants. We offer several vacuum feedthrough flanges, including D-Sub 15-pin (standard), Fischer 12-pin and Lemo 12-pin. For more info, please contact us.

Product videos

Ultrasonic linear piezo stage | XLS

The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

The XLS is the fastest linear stage of such a small size in the world.

Optional guideways for extreme precision are available upon request for increased straightness, flatness, pitch, yaw & roll performance.

Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

Coarse + fine positioning in one

It is not uncommon within the world of precision motion to use two stages for reaching one final position. In such cases, a typical setup may contain an electromagnetic stage for the initial coarse (rough) positioning, with a second stage (typically piezo-driven) mounted on top of it for fine, submicron adjustments. This typically involves having to buy multiple controllers as well.

With Xeryon's linear stages, this is a thing of the past. The combination of a long travel range and nanometer precision allows the entire process to be completed with a single stage.

This results in greatly reduced design complexity, size, costs and an increase in ease of use.

Why buy two stages if one can do the job?

Frequently asked questions

Our Crossfixx™ ultrasonic piezo motor uses vibration to move a ceramic tip in an elliptical pattern at a very high frequency (80 kHz - 180 kHz). Spring-loaded against a ceramic strip inside the stage, it generates very small but rapid movements, resulting in high-speed motion and silent operation with a long lifetime.

This gives you the best of both worlds:

1) The lifetime and speed of an electromagnetic motor.
2) The precision and compactness of a piezo stage.

Xeryon’s ultrasonic piezo stages offer the precision and size of traditional piezo stages, without their typical drawbacks.

Our stages are much faster, have a much larger stroke, a much (much!) longer lifetime, operate noiselessly, consume less power, and operate at a much lower voltage at the piezo element.

Consequently, this allows for both coarse and fine positioning with one stage, rather than requiring two seperate stages for that.

Traditional stick-slip piezo stages operate at much lower frequencies, typically within the frequency range of small mechanical components. Apart from being in the human audible spectrum, this introduces the risk of the stick-slip piezo motor making the entire system vibrate, rather than only the motor itself.

Xeryon's ultrasonic piezo stages operate at much higher frequencies (80 - 180 kHz), ensuring silent operation and no unwanted vibrations.

Xeryon’s piezo linear stages offer a unique combination of high speed, precision, long stroke, and durability in an ultra-compact design, overcoming the limitations of traditional linear stages where trade-offs have to be made (e.g. stroke length, size factor or speed). Xeryon’s stages are gearless, self-locking, energy-efficient and operate at low voltages. They don’t produce a magnetic field, are back-driveable, and free from drift or play.

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