XLS-1 picture

XLS Ultrasonic linear piezo stage

This is the XLS series. These linear stages are driven by an ultrasonic piezo-motor, giving you an amazing lifetime and speed, with the compactness of a piezo system. And remember: All of our stages can easily be combined into a multi-axis setup. Enjoy!

Play around with the parameters, all specs will automatically update!

Select your driving force: NEW

*3N motor not available for the 30 mm variant

Select stage length ⓘ :

Travel range:

27 - 92 mm

Select encoder resolution:

*An external position encoder can still be connected to the controller.

HV/UHV vacuum option:

Short cage option ⓘ :

Vacuum feedthrough connector:

Non-magnetic option ⓘ :

Dimensions: 30 - 120 x 34 x 13 mm

Xeryon product code:

Speeds of up to 1000 mm/s possible in the open-loop configuration.

1 - 2 weeks leadtime for most products !

Compact & precise linear stage

The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. This allows fast positioning with micrometer precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced. The integrated encoder has a resolution of 1.25 µm.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Technical information

Key features

Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision crossed-roller
Lifetime distance: > 100 km

Mechanical properties

Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Mass (w/o connector): 50 - 151 g

Load capacity: < 0.5 kg
Holding force: 1 N
Driving force: 1 N

Stage material: anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male or optional LEMO connector

Motion performance (closed-loop)

Encoder type: inductive, incremental
Grating period: 1280 µm
Encoder resolution: 1.25 µm

Positioning resolution: 1.25 µm
 = min. step size
 = min. incremental motion

Bidir. repeatability: ± 2.5 µm

Max. speed: 200 mm/s
Min. speed: 2 to 5 µm/s
Speed stability: ± 1%

Error motion

Straightness/flatness error:  ± 5 - 10 µm
(depends on stage length)


Vacuum (10-6 mbar): -HV
Short cage option for increased stroke: -SC

Environmental compatibility

Temp. range: -30°C to +70°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation (motor only): < 1 W


Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.

A detailed description of the different technical terms can be found on the terminology page.

Product range overview

Travel range
Travel range with
short cage (-SC)
Stage mass
XLS-1-303034131019401 N ultrasonic piezo
XLS-1-404034132535501 N ultrasonic piezo
XLS-3-404049132535703 N ultrasonic piezo
XLS-1-505034133038631 N ultrasonic piezo
XLS-3-505049133038883 N ultrasonic piezo
XLS-1-606034134048761 N ultrasonic piezo
XLS-3-6060491340481053 N ultrasonic piezo
XLS-1-707034134552881 N ultrasonic piezo
XLS-3-7070491345521203 N ultrasonic piezo
XLS-1-8080341350691051 N ultrasonic piezo
XLS-3-8080491350691403 N ultrasonic piezo
XLS-1-100100341375851261 N ultrasonic piezo
XLS-3-100100491375851703 N ultrasonic piezo
XLS-1-12012034131001091511 N ultrasonic piezo
XLS-3-12012049131001092053 N ultrasonic piezo
All specifications are subject to change without notice.

Drawing XLS-1-




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