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XLS Linear Piezo Stage
Nanometer Resolution, up to 110 mm Travel

XLS Linear Piezo Stage

Nanometer Resolution, up to 110 mm Travel

Nanometer precision without the complexity: direct drive, self-locking, vacuum-ready. Configure your stage and get a quote in 24 hours
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REQUEST A QUOTE
PRICING
Data Sheets & STEP
Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo
Data Sheets & STEP
Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo

XLS Linear Piezo Stage
Nanometer Resolution,
up to 110 mm Travel


Nanometer precision without the complexity: direct drive, self-locking,
vacuum-ready. Configure your stage and get a quote in 24 hours

REQUEST A QUOTE
PRICING
Data Sheets & STEP
Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo

ENCODER RESOLUTION

Down to 5 nm

closed-loop

TRAVEL RANGE

10-110 mm

configurable

SPEED RANGE

5 µm/s – 200 mm/s

constant scanning

PAYLOAD

0.5-1.5 kg

config-dependent

ULTRA COMPACT

From 13 mm

stage height

LIFETIME

>1000 km

travel distance

PIEZO LINEAR STAGES

 Xeryon offers a complete range of linear piezo stages, from the ultra-compact XLS-1 (13 mm high) to the high-force XLS-5, all built on the Crossfixx™ ultrasonic drive platform. Available in different stage lengths, travel ranges, encoder resolutions, and standard, high-vacuum (HV) or ultra-high-vacuum (UHV) versions. Configure yours below to see the exact specification and price; typical lead time is 2–4 weeks.

One drive does what normally takes three components

Nanometer resolution normally means stacking a fine axis on a coarse one, adding a brake to hold position, and managing motor heat. The XLS linear piezo stage does all three with one ultrasonic motor.

70x  the stroke

110 mm of travel, where flexure piezo stages stop at 1.5 mm

20x  faster, and smooth

200 mm/s continuous, where stick-slip drives jerk along at 10 mm/s

0W  to hold position

Self-locking at rest, where electromagnetic stages need power, a brake, and shed heat
Self-locking (power off)
Closed-loop, built in encoder
Low heat dissipation
HV/UHV options
Zero magnetic field

Build your Piezo Linear Stage

Stage Configurator & Pricing

Series / driving force

Stage length

Encoder resolution

Vacuum compatibility

Need a short cage on another length or a custom cable length? Contact us directly.

Your configuration
Travel range
Dimensions (L×W×H)
Load capacity
Mass of the stage
Max speed
Indicative price
Request a Quote View Detailed Specs

Ships in 2–4 weeks · Prices excl. controller & VAT

Product codeTravelResolutionVacuumPrice (1 pc)

Same stage shown at every encoder resolution — your configuration is highlighted. Prices are indicative and subject to change; contact us for a formal quote and volume discounts (QTY ≥ 10). We supply and ship globally.

A linear piezo stage is a positioning device that uses a piezoelectric motor to move a slider along a single axis with nanometer precision. Xeryon XLS linear piezo stages extend this capability beyond the sub-millimeter travel of conventional flexure-based designs, delivering up to 110 mm of travel, speeds ranging from low-speed micrometer-per-second scanning to 200 mm/s, and closed-loop encoder resolution down to 5 nm.

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Full Specification

Everything you need to evaluate the XLS in your design. Download the spec sheet and STEP file to model it yourself.

Motion Performance (closed-loop)

Positioning resolution

5 / 78 / 312 / 1250 nm (encoder option)

Encoder

optical, incremental

Bidirectional repeatability

± encoder resolution

Max Speed

200 mm/s

Min speed

5 µm/s (slow scanning)

Speed stability

±2 %

Payload

0.5–1.5 kg (config-dependent)

Mechanical & Environmental

Driving force

1 / 3 / 5 N

Travel range

10–110 mm 

Dimensions (L × W × H)

30–120 × 34–47.6 × 13–16.8 mm

Mass

40–241 g

Lifetime

>1000 km travel / 20M cycles

Temperature range

−30 to +70 °C

Vacuum versions

standard / HV 10⁻⁶ / UHV 10⁻⁹ mbar

Technical Resource Hub

Our XLS Piezo Linear Stages in Action

Piezoelectric linear stage

Xeryon stages are modular, allowing for easy multi-axis configurations

Linear piezo stage


Our high-speed stages allow for both coarse & fine motion in one.

XY Piezo Stage
Motorized XY stage

Motorized XY Stages - Speeds of up to 250 mm/s

Every XLS stage is self-locking when the power is off and provides quiet, maintenance-free operation from −30 °C to +70 °C and does not generate a magnetic field. High-vacuum and ultra-high-vacuum versions are available, and the stages can be easily combined into XY and XYZ configurations.
Ready to order — or still weighing your options?
Send us your configuration for a formal quote, or your travel, load and resolution targets if you'd like us to spec it. Our motion engineers reply within 1 business day.
Send us your requirements or configuration for a formal quote. Our motion engineers reply within 1 business day.

Why Engineers Choose Xeryon

Nine reasons the XLS replaces stacked, geared and electromagnetic axes

PRECISION YOU CAN TRUST

Coarse + fine motion in one
mm travel and nm steps from a single drive — no stacked stages
 
Closed-loop control
optical incremental encoder defines accuracy — no drift, no loss over lifetime
 
High repeatability
encoder-level bidirectional repeatability, zero backlash

BUILT TO KEEP RUNNING

Maintenance-free
no lubrication, no service intervals
 
Direct drive
no screws or gears — motor drives the slider directly, with no backlash
 
Manual override allowed
push the stage by hand without lifetime impact
.
.

DROPS INTO YOUR SYSTEM

Zero magnetic field generation
safe for e-beam and sensitive optics
 
Low voltage 12–48 V
runs from just 12 V — no high-voltage amplifiers or safety overhead
 
Slow scanning speed
smooth continuous motion — from slow scanning (µm/s) up to 200 mm/s
 

At the Heart of Every XLS: the Crossfixx™ Ultrasonic Motor

Ultrasonic piezo, not stick-slip
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piezo element resonates 80–180 kHz, driving the slider through friction contact.

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continuous motion — not discrete jerky steps
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preloaded contact = passive holding force when unpowered
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closed-loop optical incremental encoder closes the position loop
At the heart of every XLS stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element is excited at its resonance frequency (80–180 kHz, far above audible range), causing its tip to trace a microscopic elliptical trajectory. Pressed against the stage slider with a controlled preload, this vibration drives the slider forward in a smooth, continuous motion, fundamentally different from stick-slip (inertia) piezo drives, which advance in discrete jerky steps and are limited to low speeds.

Because the motor drives the slider directly through friction contact, there are no screws, gears or belts: zero backlash, no lubrication, no wear-related accuracy loss. The same preload makes the stage self-locking, when power is removed, the slider holds its position rigidly without generating heat or drift. A high-resolution optical encoder closes the position loop, so accuracy is defined by the encoder, not the motor, and remains stable up to 1000 km of lifetime of the stage.

At the heart of every XLS stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element is excited at its resonance frequency (80–180 kHz, far above audible range), causing its tip to trace a microscopic elliptical trajectory. Pressed against the stage slider with a controlled preload, this vibration drives the slider forward in a smooth, continuous motion, fundamentally different from stick-slip (inertia) piezo drives, which advance in discrete jerky steps and are limited to low speeds.

Because the motor drives the slider directly through friction contact, there are no screws, gears or belts: zero backlash, no lubrication, no wear-related accuracy loss. The same preload makes the stage self-locking, when power is removed, the slider holds its position rigidly without generating heat or drift. A high-resolution optical encoder closes the position loop, so accuracy is defined by the encoder, not the motor, and remains stable over the >1000 km lifetime of the stage.

World's smallest ultrasonic crossfixx piezo motor

At the heart of every XLS stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element is excited at its resonance frequency (80–180 kHz, far above audible range), causing its tip to trace a microscopic elliptical trajectory. Pressed against the stage slider with a controlled preload, this vibration drives the slider forward in a smooth, continuous motion, fundamentally different from stick-slip (inertia) piezo drives, which advance in discrete jerky steps and are limited to low speeds.

Because the motor drives the slider directly through friction contact, there are no screws, gears or belts: zero backlash, no lubrication, no wear-related accuracy loss. The same preload makes the stage self-locking, when power is removed, the slider holds its position rigidly without generating heat or drift. A high-resolution optical encoder closes the position loop, so accuracy is defined by the encoder, not the motor, and remains stable over the >1000 km lifetime of the stage.

Why Engineers Move Away from Stick-Slip and Electromagnetic Stages

Ultrasonic Piezo vs. Stick Slip vs. Electromagnetic
Features
Xeryon's ultrasonic piezo
Stick-slip (inertia) piezo
Electromagnetic stage
Speed range
µm/s scanning up to 200 mm/s
~10 mm/s max
high
Motion quality

smooth, stable velocity

jerky micro-steps

smooth

Hold position (power off)

yes, self-locking

yes

no, needs brake/power

Heat at standstill

none

none

continuous

Magnetic field generation

none

none

yes

Audible noise

silent (80–180 kHz)

audible clicking

silent

Size / complexity

compact, direct drive

compact

bulky + cabling


Choosing between linear piezo stage technologies? Flexure-guided piezo stages offer sub-nanometer resolution but only ≤1.5 mm travel; stick-slip (inertia) drives travel further but move in slow, jerky steps. Ultrasonic resonant drives like the XLS deliver the speed of an electromagnetic stage with the precision, holding force and compactness of a piezo drive, without the magnetic fields, heat or bulky cabling.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Not sure the ultrasonic drive is right for your axis?

Send us your travel, load and resolution targets. Our motion engineers will tell you straight whether the XLS fits — and say so if it doesn't.

Request a Quote Book a Video Call Reply within 1 business day

Where Our Ultrasonic Stages Make the Real Difference

Key Industries and Applications

Made in Europe. Trusted Globally

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Xeryon fills a niche we haven’t seen anywhere else. The combination of high dynamics, integrated encoder and holding force in such a lightweight, long-stroke actuator is unmatched. Any alternative would require multiple components and still fall short in accuracy and stability.

Chief Technology Officer

High-throughput tissue engineering company

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The speed and precision of Xeryon’s actuators enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

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Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo actuators to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufacturer

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At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to downsize our design and build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer

    Video Gallery

    Frequently Asked Questions

    A linear piezo stage is a compact motion platform used for precise linear positioning in space-constrained systems. Xeryon's XLS is a miniature linear piezo stage driven by Xeryon's Crossfixx™ ultrasonic motor, combining the precision and compactness of piezo technology with high speed, long travel, and durability.

    The XLS is designed for fast positioning with submicron precision and can hold position when powered off thanks to its self-locking piezo motor. The series is available with different travel ranges, encoder resolutions, driving forces, and optional high-vacuum or ultra-high-vacuum compatibility.

    Learn more about different types of Mini or Micro Linear Piezo Stages here.

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