XLS Ultrasonic linear piezo stage
This is the XLS series. These linear stages are driven by an ultrasonic piezo-motor, giving you an amazing lifetime and speed, with the compactness of a piezo system. And remember: All of our stages can easily be combined into a multi-axis setup. Enjoy!
Play around with the parameters, all specs will automatically update!
Select your driving force: NEW
*3N motor not available for the 30 mm variant
Select stage length ⓘ :
Travel range:
27 - 92 mm
Select encoder resolution:
*An external position encoder can still be connected to the controller.
HV/UHV vacuum option:
Short cage option ⓘ :
Vacuum feedthrough connector:
Non-magnetic option ⓘ :
Dimensions: 30 - 120 x 34 x 13 mm
Xeryon product code:
XLS-1-40-1250
Speeds of up to 1000 mm/s possible in the open-loop configuration.
Compact & precise linear stage
The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. This allows fast positioning with micrometer precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced. The integrated encoder has a resolution of 1.25 µm.
Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!
Technical information
Key features
Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision crossed-roller
Lifetime distance: > 100 km
Mechanical properties
Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Mass (w/o connector): 50 - 151 g
Load capacity: < 0.5 kg
Holding force: 1 N
Driving force: 1 N
Stage material: anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male or optional LEMO connector
Motion performance (closed-loop)
Encoder type: inductive, incremental
Grating period:
Encoder resolution: 1.25 µm
Positioning resolution: 1.25 µm
= min. step size
= min. incremental motion
Bidir. repeatability: ± 2.5 µm
Max. speed: 200 mm/s
Min. speed: 2 to 5 µm/s
Speed stability: ± 1%
Error motion
Straightness/flatness error: ± 5 - 10 µm
(depends on stage length)
Options
Vacuum (10-6 mbar): -HV
Short cage option for increased stroke: -SC
Environmental compatibility
Temp. range: -30°C to +70°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation (motor only): < 1 W
Controller/software
Compatible with all Xeryon controllers.Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.
A detailed description of the different technical terms can be found on the terminology page.
Product range overview
| Length (mm) | Width (mm) | Height (mm) | Travel range (mm) | Travel range with short cage (-SC) (mm) | Stage mass (g) | Motor | |
|---|---|---|---|---|---|---|---|
| XLS-1-30 | 30 | 34 | 13 | 10 | 19 | 40 | 1 N ultrasonic piezo |
| XLS-1-40 | 40 | 34 | 13 | 25 | 35 | 50 | 1 N ultrasonic piezo |
| XLS-3-40 | 40 | 49 | 13 | 25 | 35 | 70 | 3 N ultrasonic piezo |
| XLS-1-50 | 50 | 34 | 13 | 30 | 38 | 63 | 1 N ultrasonic piezo |
| XLS-3-50 | 50 | 49 | 13 | 30 | 38 | 88 | 3 N ultrasonic piezo |
| XLS-1-60 | 60 | 34 | 13 | 40 | 48 | 76 | 1 N ultrasonic piezo |
| XLS-3-60 | 60 | 49 | 13 | 40 | 48 | 105 | 3 N ultrasonic piezo |
| XLS-1-70 | 70 | 34 | 13 | 45 | 52 | 88 | 1 N ultrasonic piezo |
| XLS-3-70 | 70 | 49 | 13 | 45 | 52 | 120 | 3 N ultrasonic piezo |
| XLS-1-80 | 80 | 34 | 13 | 50 | 69 | 105 | 1 N ultrasonic piezo |
| XLS-3-80 | 80 | 49 | 13 | 50 | 69 | 140 | 3 N ultrasonic piezo |
| XLS-1-100 | 100 | 34 | 13 | 75 | 85 | 126 | 1 N ultrasonic piezo |
| XLS-3-100 | 100 | 49 | 13 | 75 | 85 | 170 | 3 N ultrasonic piezo |
| XLS-1-120 | 120 | 34 | 13 | 100 | 109 | 151 | 1 N ultrasonic piezo |
| XLS-3-120 | 120 | 49 | 13 | 100 | 109 | 205 | 3 N ultrasonic piezo |
Drawing XLS-1-
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