XLS-1 picture

XLS Ultrasonic linear piezo stage

This is the XLS series. These linear stages are driven by an ultrasonic piezo-motor, giving you an amazing lifetime and speed, with the compactness of a piezo system. And remember: All of our stages can easily be combined into a multi-axis setup. Enjoy!

Play around with the parameters, all specs will automatically update!

Select encoder resolution:

*An external position encoder can still be connected to the controller.

Select stage length ⓘ :

Travel range:

27 - 92 mm

Select your driving force: NEW

*3N motor not available for the 30 mm variant

Vacuum option ⓘ :

Short cage option ⓘ :

Non-magnetic option ⓘ :

Dimensions: 30 - 120 x 34 x 13 mm

Xeryon product code: XLS-1-40-1250

Speeds of up to 1000 mm/s possible in the open-loop configuration.

Compact & precise linear stage


The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. This allows fast positioning with micrometer precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced. The integrated encoder has a resolution of 1.25 µm.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Technical information


Key features

Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision crossed-roller
Lifetime distance: > 100 km

Mechanical properties

Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Mass (w/o connector): 50 - 151 g

Load capacity: < 0.5 kg
Holding force: 1 N
Driving force: 1 N

Stage material: anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male

Motion performance (closed-loop)

Encoder type: inductive, incremental
Grating period: 1280 µm
Encoder resolution: 1.25 µm

Positioning resolution: 1.25 µm
 = min. step size
 = min. incremental motion

Bidir. repeatability: ± 2.5 µm

Max. speed: 200 mm/s
Min. speed: 2 to 5 µm/s
Speed stability: ± 1%

Error motion

Straightness/flatness error:  ± 5 - 10 µm
(depends on stage length)


Options

Vacuum (10-6 mbar): -HV
Short cage option for increased stroke: -SC

Environmental compatibility

Temp. range: -30°C to +70°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation (motor only): < 1 W

Controller/software

Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.

A detailed description of the different technical terms can be found on the terminology page.

Product range overview


 Length
(mm)
Width
(mm)
Height
(mm)
Travel range
(mm)
Travel range with
short cage (-SC)
(mm)
Stage mass
(g)
Motor
XLS-1-303034131019401 N ultrasonic piezo
XLS-1-404034132535501 N ultrasonic piezo
XLS-3-404049132535703 N ultrasonic piezo
XLS-1-505034133038631 N ultrasonic piezo
XLS-3-505049133038883 N ultrasonic piezo
XLS-1-606034134048761 N ultrasonic piezo
XLS-3-6060491340481053 N ultrasonic piezo
XLS-1-707034134552881 N ultrasonic piezo
XLS-3-7070491345521203 N ultrasonic piezo
XLS-1-8080341350691051 N ultrasonic piezo
XLS-3-8080491350691403 N ultrasonic piezo
XLS-1-100100341375851261 N ultrasonic piezo
XLS-3-100100491375851703 N ultrasonic piezo
XLS-1-12012034131001091511 N ultrasonic piezo
XLS-3-12012049131001092053 N ultrasonic piezo
All specifications are subject to change without notice.

Drawing XLS-1-


XLS-1 dimensions

Images


Image

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