Linear piezo stages | XLS

Compact, fast, precise & durable

This is the XLS series. These piezo linear stages are driven by our Crossfixx™ ultrasonic motor, giving you the precision and compactness of a piezo system, with amazing speed and durability.

All of our stages can easily be combined into a multi-axis setup and are available as non-magnetic or vacuum-compatible versions. Enjoy!

Only 1 - 2 weeks lead time for most products.

Compact & precise linear stage

Height:	13 ... 16.8 mm
Width:	34 ... 47.6 mm
Mass:	40 ... 241 g
Travel range:	10 ... 110 mm
Precision:	1.25 µm ... 1 nm
Max. speed:	200 mm/s
Max. positioning freq.:	50 Hz
Driving force (= holding force):	1 ... 5 N
Lifetime:	> 1000 km / typ. 20 mill. cycles
(U)HV compatibility?	Optional
Non-magnetic?	Optional. No magnetic generation by default.

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All of our stages can easily be combined into multi-axis systems (linear & rotary)

Large volumes or custom designs? Explore our OEM solutions

Compact

Starting at a mass of just 40 grams

Precise

Resolutions of up to 1 nm

Strong

Load capacity up to 2 kg

Fast

Up to 200 mm/s closed-loop speed

Compatible

One-to-one interchangeability with other stage brands

Select your linear piezo stage

Driving force

Stage length

= Travel range:

27 - 92 mm

Encoder resolution

HV / UHV vacuum - optional ⓘ

Short cage - optional ⓘ

Non magnetic - optional ⓘ

Dimensions:

30 - 120 x 34 x 13 mm

Product code:

XLS-1-40-1250

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Buy evaluation kit

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Prices depend on precision level, length, force and optional features.
Most linear stages cost between $1000 and $1600 per axis.
Most controllers between $800 (single-axis) and $2600 (multi-axis benchtop model).
XYZ setup including controller starts at $6500.

Technical details

Specs XLS-1-series* (1N model)

Specs XLS-3-series* (3N model)

Specs XLS-5-series* (5N model)

*Optional guideways for extreme precision are available upon request for improved straightness, flatness, pitch, yaw & roll error motions.

Controller & connection manual (all models)

Stages combination guide (all models)

For detailed explanations of terminology used in specification sheets, take a look at our selection guide.

Full measurement reports available upon request.

Non-magnetic

1. None of Xeryon's products generate a magnetic field, thanks to the absence of copper windings or magnets.

2. Xeryon stages can be made without any ferromagnetic materials, making them usable in magnetic fields up to 10T ('Full non-magnetic' option).

For fluctuating magnetic fields, we offer reinforced PEEK plates in order to minimize unwanted eddy current formation.

Vacuum compatibility

Xeryon's stages are available as high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-9 mbar) variants. We offer several vacuum feedthrough flanges, including D-Sub 15-pin (standard), Fischer 12-pin and Lemo 12-pin. For more info, please contact us.

Xeryon stages are modular, allowing for easy multi-axis configurations

Compact, precise & fast

Actual speed. As you can see, this is not your average piezo stage. How it works.

Coarse & fine positioning in one
No loss of accuracy over time
Maintenance free
No magnetic field generation
Direct-drive
Manually overridable without affecting lifetime
Low & safe voltage (<48V)
Low power consumption
Capable of slow and constant scanning speeds
Optional extreme precision guideways available upon request

Product videos

Ultrasonic linear piezo stage | XLS

The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

The XLS is the fastest linear stage of such a small size in the world.

Optional guideways for extreme precision are available upon request for increased straightness, flatness, pitch, yaw & roll performance.

Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

Coarse + fine positioning in one

It is not uncommon within the world of precision motion to use two stages for reaching one final position. In such cases, a typical setup may contain an electromagnetic stage for the initial coarse (rough) positioning, with a second stage (typically piezo-driven) mounted on top of it for fine, submicron adjustments. This typically involves having to buy multiple controllers as well.

With Xeryon's linear stages, this is a thing of the past. The combination of a long travel range and nanometer precision allows the entire process to be completed with a single stage.

This results in greatly reduced design complexity, size, costs and an increase in ease of use.

Why buy two stages if one can do the job?

Frequently asked questions

Our Crossfixx™ ultrasonic piezo motor uses vibration to move a ceramic tip in an elliptical pattern at a very high frequency (80 kHz - 180 kHz). Spring-loaded against a ceramic strip inside the stage, it generates very small but rapid movements, resulting in high-speed motion and silent operation with a long lifetime.

This gives you the best of both worlds:

1) The lifetime and speed of an electromagnetic motor.
2) The precision and compactness of a piezo stage.

Xeryon’s ultrasonic piezo stages offer the precision and size of traditional piezo stages, without their typical drawbacks.

Our stages are much faster, have a much larger stroke, a much (much!) longer lifetime, operate noiselessly, consume less power, and operate at a much lower voltage at the piezo element.

This allows for both coarse and fine positioning with one stage, rather than requiring two seperate stages for that.

Traditional stick-slip piezo stages operate at much lower frequencies, typically within the frequency range of small mechanical components. Apart from being in the human audible spectrum, this introduces the risk of the stick-slip piezo motor making the entire system vibrate, rather than only the motor itself.

Xeryon's ultrasonic piezo stages operate at much higher frequencies (80 - 180 kHz), ensuring silent operation and no unwanted vibrations.

An in-depth comparison of the different types of piezo motors can be found here.

Xeryon’s piezo linear stages offer a unique combination of high speed, precision, long stroke, and durability in an ultra-compact design, overcoming the limitations of traditional linear stages where trade-offs have to be made (e.g. stroke length, size factor or speed). Xeryon’s stages are gearless, self-locking, energy-efficient and operate at low voltages. They don’t produce a magnetic field, are back-driveable, and free from drift or play.

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