Piezo linear stage

Linear piezo stages | XLS

Compact, fast, precise & durable

This is the XLS series. These piezo linear stages are driven by our Crossfixx ultrasonic motor, giving you amazing durability and speed, with the precision and compactness of a piezo system.

All of our stages can easily be combined into a multi-axis setup and are available as non-magnetic or vacuum-compatible versions. Enjoy!

Only 1 - 2 weeks lead time for most products.

Compact & precise linear stage

Height:13 ... 16.8 mm
Width:34 ... 47.6 mm
Mass:40 ... 241 g
Travel range:10 ... 110 mm
Precision:1.25 µm ... 1 nm
Max. speed:200 mm/s
Max. positioning freq.:50 Hz
Driving force (= holding force):1 ... 5 N
Lifetime:> 1000 km / typ. 20 mill. cycles
(U)HV compatibility?Optional
Non-magnetic?Optional. No magnetic generation by default.

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Piezo XY stage

All of our stages can easily be combined into multi-axis systems (linear & rotary)

Piezoelectric linear stage

Large volumes or custom designs? Explore our OEM solutions


Starting at a mass of just 40 grams


Resolutions of up to 1 nm


Load capacity up to 2 kg


Up to 200 mm/s closed-loop speed


One-to-one interchangeability with other stage brands

Select your linear piezo stage

Driving force

Stage length

= Travel range:

27 - 92 mm

Encoder resolution

HV / UHV vacuum - optional ⓘ

Short cage - optional ⓘ

Non magnetic - optional ⓘ


30 - 120 x 34 x 13 mm

Product code:


Request quote
Buy evaluation kit
Ask an engineer

Prices depend on precision level, length, force and optional features.
Most linear stages cost between $1000 and $1600 per axis.
Most controllers between $800 (single-axis) and $2600 (multi-axis benchtop model).
XYZ setup including controller starts at $6500.

Technical details

Piezo XYZ stage

Xeryon stages are modular, allowing for easy multi-axis configurations

 Compact, precise & fast

Linear piezo stage

Actual speed. As you can see, this is not your average piezo stage. How it works.


  • Coarse & fine positioning in one

  • No loss of accuracy over time

  • Maintenance free

  • No magnetic field generation

  • Direct-drive

  • Manually overridable without affecting lifetime

  • Low & safe voltage (<48V)

  • Low power consumption

  • Capable of slow and constant scanning speeds

  • Optional extreme precision guideways available upon request

Product videos

Ultrasonic linear piezo stage | XLS

The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

The XLS is the fastest linear stage of such a small size in the world.

Optional guideways for extreme precision are available upon request for increased straightness, flatness, pitch, yaw & roll performance.

Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

Coarse + fine positioning in one

It is not uncommon within the world of precision motion to use two stages for reaching one final position. In such cases, a typical setup may contain an electromagnetic stage for the initial coarse (rough) positioning, with a second stage (typically piezo-driven) mounted on top of it for fine, submicron adjustments. This typically involves having to buy multiple controllers as well.

With Xeryon's linear stages, this is a thing of the past. The combination of a long travel range and nanometer precision allows the entire process to be completed with a single stage.

This results in greatly reduced design complexity, size, costs and an increase in ease of use.

Why buy two stages if one can do the job?

Frequently asked questions

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