What am I looking at?

You’re looking at a Xeryon miniature linear stage driven by our ultrasonic resonant piezo motor. This is not your regular piezo technology.

Can I combine these linear stages with other linear or rotary stages for multi-axis setups?

Yes, this is possible. All of our stages can be paired, sometimes even without the need of mounting brackets. Easily build multi-axis setups, with or without rotary axes.

Linear piezo stages | 'XLS'

The XLS series piezo linear stages are driven by our Crossfixx™ ultrasonic motor, giving you the best of both worlds:

1) The precision and compactness of piezo
2) Amazing speed, travel and durability

All of our stages can easily be combined into a multi-axis setup and are available as ultra-high vacuum or vacuum-compatible versions.

Only 2 - 4 weeks lead time for most products.

Micro linear stage with built-in encoder

Control:	Closed loop
Height:	13 ... 16.8 mm
Width:	34 ... 47.6 mm
Mass:	40 ... 241 g
Travel range:	10 ... 110 mm
Resolution:	1.25 µm ... 5 nm
Max. speed:	200 mm/s
Max. positioning freq.:	50 Hz
Driving force (= holding force):	1 ... 5 N
Lifetime:	> 1000 km / typ. 20 mill. cycles
Vacuum compatibility?	Optional

Precise, fast, compact. Holds position when powered off.

▼ View full specs

Select your linear piezo stage

Driving force

Stage length

= Travel range:

27 - 92 mm

Encoder resolution

HV / UHV vacuum - optional ⓘ

Short cage ⓘ

Dimensions:

30 - 120 x 34 x 13 mm

Product code:

XLS-1-40-1250

Request a quote

Buy development kit

Book a video call

Note: HV/UHV vacuum options are not available with the 5 N driving force.

Pricing

Item code - Stages	Travel range	Encoder resolution				Options
		1250 nm	312 nm	78 nm	5 nm	HV	UHV	SEMICON
XLS-1-30	20 mm	€1.700	€ 1.950	€ 2.350	€ 3.250	+ €1.100	Contact us	Contact us
XLS-1-40	25 mm	€1.500	€ 1.750	€ 2.150	€ 3.050	+ €1.100	Contact us	Contact us

XLS-3-40	25 mm	€1.700	€ 1.950	€ 2.350	€ 3.250	+ €1.100	Contact us	Contact us
XLS-3-60	40 mm	€1.900	€ 2.150	€ 2.550	€ 3.450	+ €1.300	Contact us	Contact us
XLS-3-80	50 mm	€2.200	€ 2.450	€ 2.850	€ 3.750	+ €1.300	Contact us	Contact us
XLS-3-80-SC	69 mm	€2.500	€ 2.750	€ 3.150	€ 4.050	+ €1.600	Contact us	Contact us
XLS-3-120	100 mm	€3.100	€ 3.350	€ 3.750	€ 4.650	+ €1.600	Contact us	Contact us

XLS-5-40	25 mm	€2.000	€ 2.250	€ 2.650	x	x	x	Contact us
XLS-5-60	40 mm	€2.200	€ 2.450	€ 2.850	x	x	x	Contact us
XLS-5-80	50 mm	€2.500	€ 2.750	€ 3.150	x	x	x	Contact us
XLS-5-80-SC	69 mm	€2.800	€ 3.050	€ 3.450	x	x	x	Contact us
XLS-5-120	100 mm	€3.600	€ 3.850	€ 4.250	x	x	x	Contact us

Please contact us for a formal quote and volume discounts (QTY ≥ 10). Prices are indicative and subject to change without notice.

HV = High Vacuum UHV = Ultra High Vacuum

Prices shown are in Euros (€). We supply and ship globally. Contact us for international quotes or orders.

	Encoder resolution
Controllers	1250 nm	312 nm	78 nm	5 nm
XLS-1
Single-axis	XD-C, €990	XD-C, €990	XD-C, €990	XD-M-1, €1.550
Multi-axis*	XD-M-2, €1.750	XD-M-2, €1.750	XD-M-2, €1.750	XD-M-2, €1.750

XLS-3
Single-axis	XD-C, €990	XD-C, €990	XD-C, €990	XD-M-1, €1.550
Multi-axis*	XD-M-2, €1.750	XD-M-2, €1.750	XD-M-2, €1.750	XD-M-2, €1.750

XLS-5
Single-axis	XD-OEM, €990	XD-OEM, €990	XD-OEM, €990	x
Multi-axis**	XD-OEM, €990	XD-OEM, €990	XD-OEM, €990	x

XD-C is PCB-only by default. €200 extra for the desktop model.
* 2-Axis model. €300 for each additional axis, up to 6 axes.
** Additional motherboard required. Ask sales for details.

Technical details

Specs XLS-1-series* (1N model)

Specs XLS-3-series* (3N model)

Specs XLS-5-series* (5N model)

*Optional guideways for extreme precision are available upon request for improved straightness, flatness, pitch, yaw & roll error motions.

Controller manual XD-C (single-axis)

Controller manual XD-M (multi-axis)

Stages combination guide (all models)

For detailed explanations of terminology used in specification sheets, take a look at our selection guide.

Full measurement reports available upon request.

Xeryon stages are modular, allowing for easy multi-axis configurations

Compact, precise & fast

Our high-speed stages allow for both coarse & fine motion in one. How it works.

Coarse & fine positioning in one
No loss of accuracy over time
Maintenance free
No magnetic field generation
Direct-drive
Manually overridable without affecting lifetime
Low & safe voltage (<48V)
Low power consumption
Capable of slow and constant scanning speeds
Optional extreme precision guideways available upon request

Made in Europe. Trusted globally.

Xeryon fills a niche we haven’t seen anywhere else. The combination of high dynamics, integrated encoder and holding force in such a lightweight, long-stroke actuator is unmatched. Any alternative would require multiple components and still fall short in accuracy and stability.

Chief Technology Officer

High-throughput tissue engineering company

The speed and precision of Xeryon’s actuators enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo actuators to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufacturer

At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to downsize our design and build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer

Ultrasonic linear piezo stage | XLS

The XLS is a precise linear stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced.

The XLS is the fastest linear stage of such a small size in the world.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

Frequently asked questions

Our Crossfixx™ ultrasonic piezo motor uses vibration to move a ceramic tip in an elliptical pattern at a very high frequency (80 kHz - 180 kHz). Spring-loaded against a ceramic strip inside the stage, it generates very small but rapid movements, resulting in high-speed motion and silent operation with a long lifetime.

This gives you the best of both worlds:

1) Lifetime and speed comparable to a direct-drive electromagnetic motor.
2) The precision and compactness of a piezo stage.

Xeryon’s ultrasonic piezo stages offer the precision and size of traditional piezo stages, without their typical drawbacks.

Our stages are much faster, have a much larger stroke, a much (much!) longer lifetime, operate noiselessly, consume less power, and operate at a much lower voltage at the piezo element.

This allows for both coarse and fine positioning with one stage, rather than requiring two seperate stages for that.

Traditional stick-slip piezo stages operate at much lower frequencies, typically within the frequency range of small mechanical components. Apart from being in the human audible spectrum, this introduces the risk of the stick-slip piezo motor making the entire system vibrate, rather than only the motor itself.

Xeryon's ultrasonic piezo stages operate at much higher frequencies (80 - 180 kHz), ensuring silent operation and no unwanted vibrations.

An in-depth comparison of the different types of piezo motors can be found here.

Xeryon’s piezo linear stages offer a unique combination of high speed, precision, long stroke, and durability in an ultra-compact design, overcoming the limitations of traditional linear stages where trade-offs have to be made (e.g. stroke length, size factor or speed). Xeryon’s stages are gearless, self-locking, energy-efficient and operate at low voltages. They don’t produce a magnetic field, are back-drivable, and free from drift or play.