Semiconductor manufacturing

Precision, speed, reliability and miniaturization are synonymous with semiconductor manufacturing. This makes Xeryon's ultrasonic piezo products a highly suitable choice.

These requirements explain why ultrasonic piezo technology has become increasingly important in advanced semiconductor equipment.

We have extensive experience with both semiconductor R&D and manufacturing applications.

Example applications

Pick and place heads
Die bonding alignment
Inspection & metrology
Test handlers
Wafer positioning & scanning
Tool & objective positioning
And many more...

Such motion-critical tasks rely on compact linear actuators and stages capable of combining speed, precision, and repeatability in a small footprint.

Our miniature linear actuators are often used in electronics picking applications:
They allow for zero-pitch arrays, are self-locking and are highly durable.

Fast & precise

Modern semiconductor equipment increasingly depends on miniature linear actuators that can deliver sub-micron positioning at high speeds.

Xeryon's actuators and stages stand out in the market for their exceptional speed, precision and compactness, boasting the capability to achieve submicron positioning at a rapid pace of up to 400 mm/s in a small envelope.

They are designed for high efficiency, with very low settling times reaching down to 20 milliseconds, and ensure high repeatability. This combination of features facilitates increased throughput without compromising on the quality required in manufacturing processes.

Stackable & ultra compact

Furthermore, Xeryon's miniature actuators are characterized by their remarkably small size and light weight, with dimensions as narrow as 6 mm in width and a mass of merely 6 grams.

This allows for actuator array downsizing, manipulator weight reduction and system design simplification.

Reliability

Unlike traditional piezo technologies, Xeryon's ultrasonic piezo motors achieve lifetimes of 100 million cycles or thousands of kilometers. Furthermore, there are no gears or other transmission components involved, resulting in a highly simple and reliable design.

Vacuum compatibility

Most of our products are available with high vacuum compatibility (HV) and ultra high vacuum compatibility (UHV). We continuously invest in material selection, product design and rigorous testing in order to ensure reliable performance in high-precision, high-vacuum semiconductor manufacturing environments.

Made in Europe. Trusted globally.

Xeryon fills a niche we haven’t seen anywhere else. The combination of high dynamics, integrated encoder and holding force in such a lightweight, long-stroke actuator is unmatched. Any alternative would require multiple components and still fall short in accuracy and stability.

Chief Technology Officer

High-throughput tissue engineering company

The speed and precision of Xeryon’s actuators enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo actuators to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufacturer

At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to downsize our design and build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer