Vertical piezo stages | XVS
Compact, fast, precise & durable
This is the XVS series. These vertical piezo stages offer fast submicron positioning on the vertical axis while keeping size at a minimum.
Additional benefits of the stage's ultrasonic piezo motor include a very long lifetime, quiet operation and power-off locking.
These vertical stages can easily be combined into a multi-axis setup (e.g. with horizontal or rotary stages) and are available as non-magnetic and vacuum-compatible versions.
Only 1 - 2 weeks lead time for most products.
Compact & precise vertical stage
Starting at a mass of less than 50 grams
Resolutions between 1.25 µm and 1 nm (open-loop also available)
Up to 200 mm/s in closed-loop, 1000 mm/s open-loop (minimum: 1 µm/s)
Stroke lengths between 10 and 110 mm
Fast point-to-point positioning:
Stroke frequency up to 50 Hz
Smooth power delivery:
1N, 3N and 5N direct-drive ultrasonic piezo motors
Lifetime > 1000 km or 20 million cycles
Small but strong:
Load capacity up to 100 grams or 500 grams with mass compensation
Non-magnetic and vacuum-compatible versions available
Select your vertical piezo stage
*The selected length is only available with a 1N motor
*The selected length is only available with a 3N motor
= Travel range
27 - 92 mm
HV / UHV vacuum - optional ⓘ
Short cage - optional ⓘ
Non magnetic - optional ⓘ
= Maximum payload
40 g (+500 g with mass compensation)
Need extra lifting capacity? Check out our vertical lifting platform.
Compact, precise & fast vertical stages
No wear-induced play (no loss of accuracy over time)
No magnetic field generation
Direct-drive, no bulky gears or other transmission components
Back-driveable (manually overridable without affecting lifetime)
Low & safe voltage (<48V)
Low power consumption
Capable of slow and constant scanning speeds
Ultrasonic vertical piezo stage | XLS
The Xeryon Vertical Stage (XVS) is a precise vertical stage driven by an ultrasonic piezo motor. This allows fast positioning with submicron precision. The self-locking piezo motor holds the position of the vertical stage when it is not powered. As a result, heat dissipation is considerably reduced.
The XVS is the fastest vertical stage of such a small size in the world.
Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!
Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.
The Xeryon Vertical Stage can be equiped with a mass compensation spring. The spring compensates a large portion of the weight of the payload, still alowing the piezo-motor to move the stage up and down. What's the catch? The load can't vary too much. For example: if you have a load of 300 grams, it shouldn't vary more than 40g in order to lift it with our 1N motor.
Using a mass compensation mechanism is an elegant way to lift a heavy load with a small lifting stage. You keep the compactness of a piezo-stage, but you get the lifting power of convention drive technology.
Xeryon uses tension springs and magnetic counterweights in its mass compensation designs. Contact us to know more about this clever solution.