Vertical piezo stages | 'XVS'
Compact, fast, precise & durable
This is the XVS series. These vertical piezo stages offer fast submicron positioning on the vertical axis while keeping size at a minimum.
Additional benefits of the stage's ultrasonic piezo motor include a very long lifetime, quiet operation and power-off locking.
Xeryon's vertical stages can easily be combined into a multi-axis setup (e.g. with horizontal or rotary stages) and are available as non-magnetic and vacuum-compatible versions.
Enjoy!
Only 1 - 2 weeks lead time for most products.
Precise vertical stage with built-in encoder
Compact
Starting at a mass of less than 50 grams
Precise
Resolutions between 1.25 µm and 5 nm (open-loop also available)
Fast
Up to 200 mm/s in closed-loop, 1000 mm/s open-loop (minimum: 1 µm/s)
Long travel:
Stroke lengths between 10 and 110 mm
Modular system for easy multi-axis configuration
Large volumes or custom designs? Explore our OEM solutions
Fast point-to-point positioning
Stroke frequency up to 50 Hz
Smooth
1N, 3N and 5N direct-drive ultrasonic piezo motors
Durable
Lifetime > 1000 km or 20 million cycles
Strong
Load capacity up to 100 grams or 500 grams (mass compensation)
Versatile
Non-magnetic and vacuum-compatible versions available
Compatible
One-to-one interchangeability with other stage brands
Select your vertical piezo stage
Driving force
*The selected length is only available with a 1N motor
*The selected length is only available with a 3N motor
Stage height
= Travel range
27 - 92 mm
Encoder resolution
HV / UHV vacuum - optional ⓘ
Short cage - optional ⓘ
Non magnetic - optional ⓘ
= Maximum payload
Pricing
Stages
Please contact us for a formal quote and volume discounts (QTY ≥ 10). Prices are indicative and subject to change without notice. For vertical mounting, we offer an L-bracket for €390 / $421.
HV = High Vacuum UHV = Ultra High Vacuum
NM = Non-Magnetic CR = Cleanroom
Controllers
XD-C is PCB-only by default. €200 / $216 extra for desktop models.
* 2-Axis model. €300 / $324 for each additional axis, up to 6 axes.
** Additional motherboard required. Ask sales for details.
Technical details
Applied industries (examples)
Need extra lifting capacity? Check out our vertical lifting platform.
Compact, precise & fast vertical stages
-
No wear-induced play (no loss of accuracy over time)
-
Maintenance free
-
No magnetic field generation
-
Direct-drive, no bulky gears or other transmission components
-
Back-drivable (manually overridable without affecting lifetime)
-
Low & safe voltage (<48V)
-
Low power consumption
-
Capable of slow and constant scanning speeds
Made in Europe. Trusted globally.
+ Over 500 NDA's
The speed and precision of Xeryon’s products enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.
Director of R&D
Fluorescence microscope manufacturer
Our laser systems use a large system of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo stages to be much more durable than the ones we used before.
Senior Optomechanical Designer
Ultrafast laser source manufacturer
At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.
Principal Mechanical Engineer
Leading semiconductor test equipment manufacturer
Ultrasonic vertical piezo stage | XLS
The Xeryon Vertical Stage (XVS) is a precise vertical stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the vertical stage when it is not powered. As a result, heat dissipation is considerably reduced.
The XVS is the fastest vertical stage of such a small size in the world.
Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!
Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.
Mass compensation
The Xeryon Vertical Stage can be equiped with a mass compensation spring. The spring compensates a large portion of the weight of the payload, still alowing the piezo-motor to move the stage up and down. What's the catch? The load can't vary too much. For example: if you have a load of 300 grams, it shouldn't vary more than 40g in order to lift it with our 1N motor.
Using a mass compensation mechanism is an elegant way to lift a heavy load with a small lifting stage. You keep the compactness of a piezo-stage, but you get the lifting power of convention drive technology.
Xeryon uses tension springs and magnetic counterweights in its mass compensation designs. Contact us to know more about this clever solution.
Frequently asked questions
Can't find what you're looking for?
Apologies! Send us your question and we will get back to you as soon as possible.
