Ultrasonic piezo motor | 'XUMU'

World's fastest piezo motor. Direct-drive, non-magnetic and equipped with integrated encoder.

The XUMU is a direct-drive ultrasonic piezoelectric motor, with integrated controller, allowing for an extremely compact design and easy integration in applications like micro automation, sample positioning and OEM motion projects.

The XUMU comes with a ceramic strip which can be attached to the object you wish to move. A detailed explanation can be found below.

Enjoy!

Only 1 - 2 weeks lead time for most products.

Compact & durable ultrasonic piezo motor

Fast

Up to 1000 mm/s

Smooth

3N, 5N or 10N direct-drive ultrasonic piezo motors

Durable

Lifetime > 1000 km / typ. 20 million cycles

▼ Go to specs

Example of linear application. Rotary motion is possible as well.

Rotary example. Need a custom design? Explore our OEM solutions

Compact:

Starting with a weight of just a few grams

Low-voltage

Safe, 12V operation

Integrated controller

For analog / PWM control. External controller also available.

Select your ultrasonic piezo motor

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Driving force

Ceramic strip length

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Product code:

XUMU-3-X

Request pricing

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Volume pricing from €150 / $160 per motor.
Lead time just 1 - 2 weeks for most products. Evaluation kits available for all of our products.

Need an integrated solution? Consider our micro linear actuators.

Additional benefits

No wear-induced play (no loss of accuracy over time)
Maintenance free
No magnetic field generation
Direct-drive, no bulky gears or other transmission components
Back-driveable (manually overridable without affecting lifetime)
Low & safe voltage (12V)
Low power consumption

Technical details

Product video

Ultrasonic motors by Xeryon

The non-magnetic XUMU motor is driven by the Crossfixx™️ ultrasonic piezoelectric technology, allowing for a silent and fast positioning of any object. With a direct-drive force of up to 10N, this is the world’s leading piezo motor in terms of force, speed and integrability.

The lifetime of over 1000km (or 10 million cycles) puts the XUMU at the top of the ultrasonic actuators, supporting a wide range of applications. The XUMU motor is a real OEM product but a break-out board is available for test setups.

How it works:

1. The motor's ceramic tip vibrates in an elliptical pattern at a very high frequency.

2. When the tip contacts another object, this vibration will result in movement of said object.

3. The XUMU comes with a ceramic strip, which can be attached to the object you wish to move. Both linear and rotary movement is possible.

4. The motor can be controlled by analog control or PWM. A version with an external controller is also available.

The XUMU comes with the ultrasonic motor with suspension, an adhesive ceramic strip, mounting screws and an optional break-out board for test setups.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

Trusted by numerous industry leaders

+ Over 500 NDA's

The speed and precision of Xeryon’s products enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo stages to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufucturer

At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer

Controlling the XUMU

You can control the speed of the XUMU ultrasonic motor with an analog signal on the “SPD” pin. The analog input voltage can range from 0V to 3.3V which corresponds to lowest speed (standstill) to full speed.

You can control the speed with a PWM signal on the “SPD” pin. This signal should not exceed 3.3V and the frequency has to stay between 200 Hz and 200 kHz. By varying the duty cycle of the PWM signal you can control the speed from the lowest speed (standstill) to full speed.