Multi-axis piezo stages (XY, XYZ, ...)

Easily combine linear & rotary piezo stages

Most of our linear and rotary stages can be mounted into an XY stage, XYZ stage, or other combination. All you need is 4 bolts.

Simply select your:

- X and Y axes from our linear stages;

- Z axis from our vertical stages;

- Rotational axes from our rotational stages.

Any combination is possible.

Check out our stages combination guide to see the possibilities.

Only 1 - 2 weeks lead time for most products.

Precision XY, XYZ, XTheta or XYTheta stages

Ultra compact:

Starting at a mass of less than 40 grams per stage

High precision:

Resolutions of up to 1 nm (linear) and 3 µrad (rotary)

High speed:

Up to 1000 mm/s (linear) and 720°/s (rotary)

Ultra durable

Lifetime > 1000 km (linear) and > 5 million revolutions (rotary)

▼ Go to specs

Smooth power delivery:

Stages driven by 1N, 3N and 5N direct-drive ultrasonic piezo motors

Small but strong:

Load capacity up to 2000 grams

Extremely versatile:

Non-magnetic and vacuum-compatible versions available for all stages

Low and safe voltage:

Stages operate at < 48V

Select the stages for your multi-axis setup here:

Or talk to our integration engineers:

Request pricing

Lead time just 1 - 2 weeks for most products. Evaluation kits available for all of our products.

Compact, precise & fast

No wear-induced play (no loss of accuracy over time)
Maintenance free
No magnetic field generation
Direct-drive, no bulky gears or other transmission components
Back-driveable (manually overridable without affecting lifetime)
Low & safe voltage (<48V)
Low power consumption
Capable of slow and constant scanning speeds

All of our stages can easily be combined into multi-axis systems (linear & rotary)

Technical details

Product videos

Piezo XY and XYZ stages by Xeryon

Our precision stages can be combined into different configurations such as XY, XYZ XTheta or XYTheta. The matching mounting hole patterns of our different stages makes it very easy to build any configuration without the use of custom adapter plates.

These multi-axis setups allow you to position with nanometer precision and repeatability in multiple degrees of freedom. Thanks to the ultrasonic piezo drive technology of the individual stages, your multi-axis setup will have a long lifetime, position fast and noiseless and holds its position when powered off. One can even move at very low and constant speeds (µm/s).

These features make it the perfect microscope stage or multi-axis sample stage for material science applications. All of our stages can be used in vacuum. Have a look at the specs of our individual stages for more information.

Full measurement reports available upon request.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Non-magnetic multi-axis piezo stages

All of our stages are available as non-magnetic versions. But what does this mean exactly?

1. Xeryon products do not generate a magnetic field, thanks to the absence of copper windings or magnets.

2. Xeryon stages can be made without any ferromagnetic materials, making them usable in magnetic fields up to 10T ('Full non-magnetic' option).

For more information, do not hesitate to contact us.

Frequently asked questions

Xeryon’s ultrasonic piezo stages offer a unique combination of high speed, precision, long stroke (linear), and durability in an ultra-compact design, overcoming the limitations of traditional piezo stages where trade-offs have to be made (e.g. speed, stroke length or size factor). Xeryon’s stages are gearless, self-locking, energy-efficient and operate at low voltages. They don’t produce a magnetic field, are back-driveable, and free from drift or play.