Precision Linear Stages

Compact and precise linear piezo stages. Easy to install, easy to operate.

Xeryon offers a range of linear precision stages in different lengths and with many additional options. With travel ranges up to 100 mm, the number of possible applications is endless. Thanks to the patented Crossfixx™ ultrasonic piezo technology, travel velocities of 200 mm/s can be reached, making Xeryon linear precision stages the fastest precision stages on the market. Xeryon linear stages are perfectly fit for any scanning setups, providing constant scanning speed with a velocity variation of less than 2%.

All of our stages are easy to install and intuitive to use. Connect the stage to the controller and move to the desired position by using our software of by guiding with our separate manual controls.

Xeryon offers different levels of precision, from our Original series with a resolution of 1.5 µm, up to our Ultimate series with a resolution of 10 nm. For each model, additional options are available – for example, high vacuum compatibility, making the stage the perfect solution for your SEM or your vacuum chamber. With the optional extra small cage, we can get even more travel distance from our stages, driving the volume vs stroke ratio to the limit.

Linear stage types


All of our linear stages are driven by an ultrasonic piezo motor


xls-1 original

XLS Original series

Drive principle: Ultrasonic
Linear resolution: 1.5 µm

Stage length: Variable


xls-1 high precision

XLS High precision series

Drive principle: Ultrasonic
Linear resolution: 300 nm

Stage length: Variable
Vacuum option: 10-6 mbar
Short cage option: up to 15mm extra stroke


xls-1 ultra precision

XLS Ultra precision series

Drive principle: Ultrasonic
Precision: 78 nm

Stage length: Variable
Vacuum option: 10-6 mbar
Short cage option: up to 15mm extra stroke


xls-1 ultimate series

XLS Ultimate series

Drive principle: Ultrasonic
Precision: 10 nm

Stage length: Variable
Vacuum option: 10-6 mbar
Short cage option: up to 15mm extra stroke

Of course, Xeryon linear precision stages also benefit from the same advantages as our rotary stages. Thanks to our Crossfixx™ technology, the stages are self-locking when in position, without any vibrations or energy consumption. The ultrasonic technology prevents the typical unpleasant sounds associated with most piezo motion systems, rendering ours completely silent.

All of our stages (rotary and linear) can be combined to create additional axes to suit your needs. The stages are easily mountable and custom brackets can be made if needed.

If you can’t find exactly what you need in our standard product range, contact our engineering department for customised solutions. Check our custom project section for more information.