Precision Linear Stages

Compact and precise linear piezo stages

Xeryon offers a range of linear precision stages in different lengths and with many additional options. With travel ranges up to 100mm, the number of possible applications is endless. Thanks to the patented Crossfixx™ ultrasonic piezo technology, travel velocities of 200mm/s can be reached, making Xeryon linear precision stages the fastest nano-precision stages on the market.

Xeryon offers different levels of precision, from our Original series with a resolution of 1.5 µm, up to our Ultimate series with a resolution of 10 nm. For each model, additional options are available – for example, high vacuum compatibility, making the stage the perfect solution for your SEM or your vacuum chamber. With the optional extra small cage, we can get even more travel distance from our stages, driving the volume vs stroke ratio to the limit.

Linear stage types


Both stages are driven by an ultrasonic piezo motor


xls-1 ultra

XLS-1 Original series

Drive principle: Ultrasonic
Precision: 1.5 µm

Stage length: Variable


xls-1

XLS-1 High precision series

Drive principle: Ultrasonic
Precision: 300 nm

Stage length: Variable
Vacuum: Variable
Short cage: Variable


xls-1 ultra

XLS-1 Ultra precision series

Drive principle: Ultrasonic
Precision: 78 nm

Stage length: Variable
Vacuum: Variable
Short cage: Variable


xls-1

XLS-1 Ultimate series

Drive principle: Ultrasonic
Precision: 10 nm

Stage length: Variable
Vacuum: Variable
Short cage: Variable

Of course, Xeryon linear precision stages also benefit from the same advantages as our rotary stages. Thanks to our Crossfixx™ technology, the stages are self-locking when in position, without any vibrations or energy consumption. The ultrasonic technology prevents the typical unpleasant sounds associated with most piezo motion systems, rendering ours completely silent.

All of our stages (rotary and linear) can be combined to create additional axes to suit your needs. The stages are easily mountable and custom brackets can be made if needed.

If you can’t find exactly what you need in our standard product range, contact our engineering department for customised solutions. Check our custom project section for more information.