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XVS Ultrasonic vertical piezo stage

Discover our  vertical piezo lifting stages. The lifting power of the stage depends on the length of the stage and the selected piezo motor. Xeryon offers a range of brackets that can be mounted on the stage to create a horizontal load platform. Check our auxiliaries page to know more or ask your Xeryon contact or have a look at our custom projects page to learn more about custom sample holders and brackets that Xeryon offers.

Select your driving force: NEW

*The selected length is only available with a 1N motor

Max payload:

40 g (+500 g with mass compensation)

Select stage height ⓘ :

Travel range:

27 - 92 mm

Select encoder resolution:

*An external position encoder can still be connected to the controller.

HV/UHV vacuum option:

Short cage option ⓘ :

Vacuum feedthrough connector:

Non-magnetic option ⓘ :

Dimensions: 30 - 120 x 34 x 13 mm

Xeryon product code:

Speeds of up to 1000 mm/s possible in the open-loop configuration.

1 - 2 weeks leadtime for most products !

Compact & precise linear stage

The Xeryon Vertical Stage (XVS) is a precise vertical stage driven by an ultrasonic piezo motor. This allows fast positioning with micrometer precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced. The integrated encoder has a resolution of 1.25 µm, 312 nm, 78 nm, 5nm or 1nm.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Mass compensation

The Xeryon Vertical Stage can be equiped with a mass compensation spring. The spring compensates a large portion of the weight of the payload, still alowing the piezo-motor to move the stage up and down. What's the catch? The load can't vary too much. For example: if you have a load of 300 grams, it shouldn't vary more than 40g in order to lift it with our 1N motor!

Using a mass compensation spring is an elegant way to lift a heavy load with a small lifting stage. You keep the compactness of a piezo-stage, but you get the lifting power of convention drive technology.

Xeryon uses tension springs and magnetic counterweights in its mass compensation designs. Contact us to know more about this clever solution.

Technical information

Key features

Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision crossed-roller
Lifetime distance: > 100 km

Mechanical properties

Dimensions: 40 - 120 x 34 x 13 mm
Stroke with standard cage: 27 - 92 mm
Mass (w/o connector): 50 - 151 g

Load capacity: < 0.5 kg
Holding force: 1 N
Driving force: 1 N

Stage material: anodised aluminium
Cable length: 1.5 m
Connector: 1x 15-pin D-sub HD male or optional LEMO connector

Motion performance (closed-loop)

Encoder type: inductive, incremental
Encoder resolution: 1.25 µm - 1nm

Positioning resolution: 1.25 µm - 25nm
 = min. step size
 = min. incremental motion

Bidir. repeatability: ± 2.5 µm

Max. speed: 200 mm/s
Min. speed: 2 to 5 µm/s
Speed stability: ± 1%

Error motion

Straightness/flatness error:  ± 5 - 10 µm
(depends on stage length)


Vacuum (10-6 mbar): -HV
Short cage option for increased stroke: -SC

Environmental compatibility

Temp. range: -20°C to +50°C
Humidity range: 20% to 90% RH (non-cond.)
Heat dissipation (motor only): < 1 W


Compatible with all Xeryon controllers.
Easy-to-use Windows interface or LabVIEW driver.
C++ and Python libraries available.

A detailed description of the different technical terms can be found on the terminology page.

Product range overview

Travel range
Travel range with
short cage (-SC)
Stage mass
XLS-1-303034131019401 N ultrasonic piezo
XLS-1-404034132535501 N ultrasonic piezo
XLS-3-404049132535703 N ultrasonic piezo
XLS-1-505034133038631 N ultrasonic piezo
XLS-3-505049133038883 N ultrasonic piezo
XLS-1-606034134048761 N ultrasonic piezo
XLS-3-6060491340481053 N ultrasonic piezo
XLS-1-707034134552881 N ultrasonic piezo
XLS-3-7070491345521203 N ultrasonic piezo
XLS-1-8080341350691051 N ultrasonic piezo
XLS-3-8080491350691403 N ultrasonic piezo
XLS-1-100100341375851261 N ultrasonic piezo
XLS-3-100100491375851703 N ultrasonic piezo
XLS-1-12012034131001091511 N ultrasonic piezo
XLS-3-12012049131001092053 N ultrasonic piezo
All specifications are subject to change without notice.


XLS-1 dimensions

XLS-1 dimensions

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