Vertical piezo stages | XVS

Compact, fast, precise & durable

This is the XVS series. These vertical piezo stages offer fast submicron positioning on the vertical axis while keeping size at a minimum.

Additional benefits of the stage's ultrasonic piezo motor include a very long lifetime, quiet operation and power-off locking.

Xeryon's vertical stages can easily be combined into a multi-axis setup (e.g. with horizontal or rotary stages) and are available as non-magnetic and vacuum-compatible versions.

Enjoy!

Only 1 - 2 weeks lead time for most products.

Compact & precise vertical stage

Compact

Starting at a mass of less than 50 grams

Precise

Resolutions between 1.25 µm and 1 nm (open-loop also available)

Fast

Up to 200 mm/s in closed-loop, 1000 mm/s open-loop (minimum: 1 µm/s)

Long travel:

Stroke lengths between 10 and 110 mm

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All machining, assembly and quality control done in Belgium, Europe

Large volumes or custom designs? Explore our OEM solutions

Fast point-to-point positioning

Stroke frequency up to 50 Hz

Smooth

1N, 3N and 5N direct-drive ultrasonic piezo motors

Durable

Lifetime > 1000 km or 20 million cycles

Strong

Load capacity up to 100 grams or 500 grams (mass compensation)

Versatile

Non-magnetic and vacuum-compatible versions available

Compatible

One-to-0ne interchangeability with other stage brands

Select your vertical piezo stage

Driving force

*The selected length is only available with a 1N motor

*The selected length is only available with a 3N motor

Stage height

= Travel range

27 - 92 mm

Encoder resolution

HV / UHV vacuum - optional ⓘ

Short cage - optional ⓘ

Non magnetic - optional ⓘ

= Maximum payload

40 g

Product code:

XVS-1-40-1250

Dimensions:

30 - 120 x 34 x 13 mm

Request quote

Price indication:

Single axis example: XVS-3-40-1250 + single-axis controller ≈ €2100 / $2300
XYZ setup example: 2x XLS-3-40-1250 (XY) + 1x XVS-3-40-1250 (Z) + three-axis controller ≈ €6500 / $7050
Prices depend on precision level, length, driving force and optional features.
Lead time 1 - 2 weeks for most products. Evaluation kits available.

Need extra lifting capacity? Check out our vertical lifting platform.

Compact, precise & fast vertical stages

No wear-induced play (no loss of accuracy over time)
Maintenance free
No magnetic field generation
Direct-drive, no bulky gears or other transmission components
Back-driveable (manually overridable without affecting lifetime)
Low & safe voltage (<48V)
Low power consumption
Capable of slow and constant scanning speeds

Technical details

Non-magnetic

1. None of Xeryon's products generate a magnetic field, thanks to the absence of copper windings or magnets.

2. Xeryon stages can be made without any ferromagnetic materials, making them usable in magnetic fields up to 10T ('Full non-magnetic' option).

For fluctuating magnetic fields, we offer reinforced PEEK plates in order to minimize unwanted eddy current formation.

Vacuum compatibility

Xeryon's stages are available as high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-9 mbar) variants. We offer several vacuum feedthrough flanges, including D-Sub 15-pin (standard), Fischer 12-pin and Lemo 12-pin. For more info, please contact us.

Ultrasonic vertical piezo stage | XLS

The Xeryon Vertical Stage (XVS) is a precise vertical stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the vertical stage when it is not powered. As a result, heat dissipation is considerably reduced.

The XVS is the fastest vertical stage of such a small size in the world.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

Mass compensation

The Xeryon Vertical Stage can be equiped with a mass compensation spring. The spring compensates a large portion of the weight of the payload, still alowing the piezo-motor to move the stage up and down. What's the catch? The load can't vary too much. For example: if you have a load of 300 grams, it shouldn't vary more than 40g in order to lift it with our 1N motor.

Using a mass compensation mechanism is an elegant way to lift a heavy load with a small lifting stage. You keep the compactness of a piezo-stage, but you get the lifting power of convention drive technology.

Xeryon uses tension springs and magnetic counterweights in its mass compensation designs. Contact us to know more about this clever solution.

Frequently asked questions

Our Crossfixx™ ultrasonic piezo motor uses vibration to move a ceramic tip in an elliptical pattern at a very high frequency (80 kHz - 180 kHz). Spring-loaded against a ceramic strip inside the stage, it generates very small but rapid movements, resulting in high-speed motion and silent operation with a long lifetime.

This gives you the best of both worlds:

1) The lifetime and speed of an electromagnetic motor.
2) The precision and compactness of a piezo stage.

Xeryon’s ultrasonic piezo stages offer the precision and size of traditional piezo stages, without their typical drawbacks.

Our stages are much faster, have a much larger stroke, a much (much!) longer lifetime, operate noiselessly, consume less power, and operate at a much lower voltage at the piezo element.

Traditional stick-slip piezo stages operate at much lower frequencies, typically within the frequency range of small mechanical components. Apart from being in the human audible spectrum, this introduces the risk of the stick-slip piezo motor making the entire system vibrate, rather than only the motor itself.

Xeryon's ultrasonic piezo stages operate at much higher frequencies (80 - 180 kHz), ensuring silent operation and no unwanted vibrations.

Xeryon’s piezo vertical stages offer a unique combination of high speed, precision, long stroke, and durability in an ultra-compact design, overcoming the limitations of traditional vertical stages where trade-offs have to be made (e.g. stroke length, size factor or speed). Xeryon’s vertical stages are gearless, self-locking, energy-efficient and operate at low voltages. They don’t produce a magnetic field, are back-driveable, and free from drift or play.

Yes. All of Xeryon's stages are available as non-magnetic and vacuum-compatible versions. A quick word about non-magnetic versions:

1. Xeryon stages do not generate a magnetic field, thanks to the absence of copper windings or magnets.
2. Xeryon stages can be made without any ferromagnetic materials, making them usable in magnetic fields up to 10T ('Full non-magnetic' option).