Linear piezo stages | 'XLS'

Precise · Fast · Compact

The XLS series piezo linear stages are driven by our Crossfixx™ ultrasonic motor, giving you the best of both worlds:

1) The precision and compactness of piezo
2) Amazing speed, travel and durability

All of our stages can easily be combined into a multi-axis setup and are available as vacuum-compatible or non-magnetic versions. Enjoy!

Only 1 - 2 weeks lead time for most products.

Micro linear stage with built-in encoder

Height:	13 ... 16.8 mm
Width:	34 ... 47.6 mm
Mass:	40 ... 241 g
Travel range:	10 ... 110 mm
Resolution:	1.25 µm ... 5 nm
Max. speed:	200 mm/s
Max. positioning freq.:	50 Hz
Driving force (= holding force):	1 ... 5 N
Lifetime:	> 1000 km / typ. 20 mill. cycles
Vacuum compatibility?	Optional
Non-magnetic body?	Optional. No magnetic field generation by default.

Precise, fast, compact. Holds position when powered off.

▼ View full specs

Piezo, but different

Ultrasonic piezo motors are relatively unknown. They're precise and small, but offer high speed and long travel, unlike traditional piezo motors.

Recently, Youtuber 'Know Art' visited Xeryon in his search to better understand precision mechanics, and by extension, piezo.

The result?

A deep dive into high-precision motion, and a great breakdown of our revolutionary technology.

Select your linear piezo stage

Driving force

Stage length

= Travel range:

27 - 92 mm

Encoder resolution

HV / UHV vacuum - optional ⓘ

Non magnetic - optional ⓘ

Short cage - 80 mm model only ⓘ

Dimensions:

30 - 120 x 34 x 13 mm

Product code:

XLS-1-40-1250

Request quote

Buy evaluation kit

Ask an engineer

Prices depend on precision level, length, force and optional features.
Most linear stages cost between $1300 and $2100 per axis.
Most controllers between $800 (single-axis) and $2000 (multi-axis benchtop model).
XYZ setup including controller starts at $6500.

Technical details

Specs XLS-1-series* (1N model)

Specs XLS-3-series* (3N model)

Specs XLS-5-series* (5N model)

*Optional guideways for extreme precision are available upon request for improved straightness, flatness, pitch, yaw & roll error motions.

Controller manual XD-C (single-axis)

Controller manual XD-M (multi-axis)

Stages combination guide (all models)

For detailed explanations of terminology used in specification sheets, take a look at our selection guide.

Full measurement reports available upon request.

Vacuum compatibility

Xeryon's stages are available as high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-9 mbar) variants. We offer several vacuum feedthrough flanges, including D-Sub 15-pin (standard), Fischer 12-pin and Lemo 12-pin. For more info, please contact us.

Non-magnetic

1. None of Xeryon's products generate a magnetic field, thanks to the absence of copper windings or magnets.

2. Xeryon stages can be made without any ferromagnetic materials, making them usable in magnetic fields up to 10T ('Full non-magnetic' option).

For fluctuating magnetic fields, we offer reinforced PEEK plates in order to minimize unwanted eddy current formation.

Xeryon stages are modular, allowing for easy multi-axis configurations

Compact, precise & fast

Our high-speed stages allow for both coarse & fine motion in one. How it works.

Coarse & fine positioning in one
No loss of accuracy over time
Maintenance free
No magnetic field generation
Direct-drive
Manually overridable without affecting lifetime
Low & safe voltage (<48V)
Low power consumption
Capable of slow and constant scanning speeds
Optional extreme precision guideways available upon request

Product videos

Trusted by numerous industry leaders:

+ Over 100 NDA's

Ultrasonic linear piezo stage | XLS

The XLS is a precise linear stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced.

The XLS is the fastest linear stage of such a small size in the world.

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.

Frequently asked questions

Our Crossfixx™ ultrasonic piezo motor uses vibration to move a ceramic tip in an elliptical pattern at a very high frequency (80 kHz - 180 kHz). Spring-loaded against a ceramic strip inside the stage, it generates very small but rapid movements, resulting in high-speed motion and silent operation with a long lifetime.

This gives you the best of both worlds:

1) The lifetime and speed of an electromagnetic motor.
2) The precision and compactness of a piezo stage.

Xeryon’s ultrasonic piezo stages offer the precision and size of traditional piezo stages, without their typical drawbacks.

Our stages are much faster, have a much larger stroke, a much (much!) longer lifetime, operate noiselessly, consume less power, and operate at a much lower voltage at the piezo element.

This allows for both coarse and fine positioning with one stage, rather than requiring two seperate stages for that.

Traditional stick-slip piezo stages operate at much lower frequencies, typically within the frequency range of small mechanical components. Apart from being in the human audible spectrum, this introduces the risk of the stick-slip piezo motor making the entire system vibrate, rather than only the motor itself.

Xeryon's ultrasonic piezo stages operate at much higher frequencies (80 - 180 kHz), ensuring silent operation and no unwanted vibrations.

An in-depth comparison of the different types of piezo motors can be found here.

Xeryon’s piezo linear stages offer a unique combination of high speed, precision, long stroke, and durability in an ultra-compact design, overcoming the limitations of traditional linear stages where trade-offs have to be made (e.g. stroke length, size factor or speed). Xeryon’s stages are gearless, self-locking, energy-efficient and operate at low voltages. They don’t produce a magnetic field, are back-driveable, and free from drift or play.