What am I looking at?

You’re looking at a Xeryon miniature linear stage driven by our ultrasonic resonant piezo motor. This is not your regular piezo technology.

Our Crossfixx™ ultrasonic piezo motor uses vibration to move a ceramic tip in an elliptical pattern at a very high frequency (80 kHz - 180 kHz). Spring-loaded against a ceramic strip inside the stage, it generates very small but rapid movements, resulting in high-speed motion and silent operation with a long lifetime. This gives you the best of both worlds: 1) Lifetime and speed comparable to a direct-drive electromagnetic motor. 2) The precision and compactness of a piezo stage.

How does it differ from other piezo linear stages like those using stick-slip (inertia) piezo?

Xeryon’s ultrasonic piezo stages offer the precision and size of traditional piezo stages, without their typical drawbacks. Our stages are much faster, have a much larger stroke, a much longer lifetime, operate noiselessly, consume less power, and operate at a much lower voltage at the piezo element. This allows for both coarse and fine positioning with one stage, rather than requiring two separate stages. Traditional stick-slip piezo stages operate at much lower frequencies, typically within the frequency range of small mechanical components, which can introduce unwanted vibrations and noise. Xeryon's ultrasonic piezo stages operate at much higher frequencies (80 - 180 kHz), ensuring silent operation and no unwanted vibrations.

How does it differ from electromagnetic linear stages?

Xeryon’s piezo linear stages offer a unique combination of high speed, precision, long stroke, and durability in an ultra-compact design, overcoming the limitations of traditional linear stages where trade-offs have to be made (e.g. stroke length, size factor or speed). Xeryon’s stages are gearless, self-locking, energy-efficient and operate at low voltages. They don’t produce a magnetic field, are back-drivable, and free from drift or play.

Can I combine these linear stages with other linear or rotary stages for multi-axis setups?

Yes, this is possible. All of our stages can be paired, sometimes even without the need of mounting brackets. Easily build multi-axis setups, with or without rotary axes.

XRT-U Piezo Rotation Stage: Microradian Resolution, Unlimited 360° Rotation

XRT-U Piezo Rotation Stage

Microradian Resolution, Unlimited 360° Rotation

Microradian precision made simple with a built-in encoder, direct drive, and self-locking technology. No extra brakes or gears needed, saving you component costs and setup time. Configure your stage and get a quote in 24 hours.

REQUEST A QUOTE

PRICING

Data Sheets & STEP

Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo

PRICING

Data Sheets & STEP

Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo

XRT-U Piezo Rotation Stage
Microradian Resolution,
Unlimited 360° Rotation

Microradian precision made simple with a built-in encoder, direct drive, and self-locking technology. No extra brakes or gears needed, saving you component costs and setup time. Configure your stage and get a quote in 24 hours.

REQUEST A QUOTE

PRICING

Data Sheets & STEP

Ships in 2–4 weeks · Made in Europe · Patented Crossfixx™ piezo

ENCODER RESOLUTION

Down to 3 µrad

closed-loop

ROTATION RANGE

>360°

unlimited

SPEED RANGE

Up to 1080°/s

constant scanning

HOLDING TORQUE

Up to 90 mNm

config-dependent

ULTRA COMPACT

From 8.9 mm

stage height

LIFETIME

>500 km

travel distance

PIEZO ROTATION STAGES

Xeryon offers a complete range of rotation piezo stages, from the ultra-compact XRT-U-25 (8.9 mm high) to the high-torque XRT-U-60, all built on the Crossfixx™ ultrasonic drive platform. Available in five rotor sizes, with different apertures, encoder resolutions, and standard, high-vacuum (HV) or ultra-high-vacuum (UHV) versions. Configure yours below to see the exact specification and price; typical lead time is 2–4 weeks.

One drive does what normally takes three components

A precision rotary axis normally means a gearbox for torque, a brake to hold position, and a plan for the heat the motor puts into your instrument. The XRT-U piezo rotation stage replaces all three with one ultrasonic motor driving the rotor directly.

1080°/s
vs. worm-gear rotation stages

Up to 12× faster than a geared stage — and smooth, where stick-slip creeps in jerky steps.

0 W
vs. magnetic direct drives

Self-locking at rest, 9.5–90 mNm. No brake, no heat, no stray field.

Zero backlash
vs. any geared stage

Direct drive — nothing to preload or re-shim, no repeatability lost to gear wear.

Self-locking (power off)

Closed-loop, built in encoder

Low heat dissipation

HV/UHV options

Zero magnetic field

See full comparison ↓

NEW

Introducing XRT-U-35

Our thinnest piezo rotation stage yet

22.5 mNm in a 9 mm-high housing. Higher torque, larger aperture, more load capacity — all in a compact footprint. The ultimate solution for space-constrained OEM integration.

CONFIGURE THE XRT-U-35

Build your Piezo Rotation Stage

Stage Configurator & Pricing

Model

Encoder resolution

Vacuum compatibility

Need a custom aperture or cable length not listed? Contact us directly.

Your configuration

Rotation range	>360° unlimited
Encoder resolution
Driving torque
Clear aperture
Max speed
Load capacity
Vacuum
Indicative price

Request a Quote View Detailed Specs

Ships in 2–4 weeks · Prices excl. controller & VAT

Product code	Encoder	Vacuum	Price (1 pc)

Swipe the table to see all columns →

Same model shown at every encoder resolution — your configuration is highlighted. Please contact us for a formal quote and volume discounts (QTY ≥ 10). Prices are indicative and subject to change without notice. HV = High Vacuum, UHV = Ultra High Vacuum. Prices shown are in Euros (€). We supply and ship globally.

Laboratory projects: XD-C controller, €990 (single-axis, easy plug-in; all resolutions) · XD-M-2 for multi-axis, €1.750 (2-axis; €300 per additional axis, up to 6).

OEM projects: XD-OEM controller, €990 — compact board-level integration, available with or without EtherCAT.

XD-C is PCB-only by default — €200 extra for desktop model · prices in €, we ship globally · Communication Overview (PDF)

A piezo rotation stage is a positioning device that uses a piezoelectric motor to rotate a payload around a single axis with microradian precision. Xeryon XRT-U piezo rotation stages extend this capability beyond the limited angular travel of conventional flexure-based designs, delivering unlimited continuous rotation beyond 360°, speeds from 0.004°/s scanning to 1080°/s, and closed-loop encoder resolution down to 3 µrad (0.62 arcsec).

Full Specification

Everything you need to evaluate the XRT-U in your design. Download the spec sheet and STEP file to model it yourself.

DOWNLOAD SPECSHEET

DOWNLOAD STEP/ 3D FILES

Motion Performance (closed-loop)

Encoder resolutions — Gen 1

109 / 49 / 19 / 3 µrad (XRT-U-25 / -30 / -40 / -60)

Encoder resolutions — Gen 2

1000 / 100 / 3 µrad (XRT-U-35)

Encoder

Optical, incremental; one index per revolution

Minimum incremental motion

Down to 3 µrad (XRT-U-35) / 15 µrad (Gen 1); encoder-dependent

Bidirectional repeatability

Down to ±3 µrad (XRT-U-35) / ±30 µrad (Gen 1); encoder-dependent

Maximum speed

Down to ±3 µrad; model and encoder-dependent

Minimum speed

1080°/s

Min speed

0.004°/s for slow scanning

Speed stability

1% typical (Gen 1); 10% (XRT-U-35)

Point-to-point positioning time

30 ms unloaded; 150 ms at 65 kg·mm² inertia (1° step, typical)

Error motion

Down to 1 µm radial, 0.5 µm axial and 50 µrad tilt/wobble

Mechanical & Environmental

Driving torque

9.5–90 mNm, configuration-dependent

Holding torque

9.5–90 mNm, configuration-dependent

Rotation range

>360° (unlimited)

Rotor diameter

27–65 mm

Clear aperture

6.35–25.4 mm

Dimensions (L × W × H)

37.5 × 30 × 8.9 mm to 70 × 70 × 38.6 mm

Mass

24–489 g, excluding connector

Payload limitation

0.1–5 kg; model-dependent

Lifetime

>500 km of motor travel / typically 10 million revolutions

Temperature range

−30 to +70°C

Vacuum versions

Standard / HV 10⁻⁶ mbar / UHV 10⁻⁹ mbar

Heat dissipation while moving

<1 W to <5 W depending on model; 0 W to hold position

Technical Resource Hub

Every XRT-U stage is self-locking when the power is off and provides quiet, maintenance-free operation from −30°C to +70°C without generating a magnetic field. High-vacuum and ultra-high-vacuum versions are available, and the stages can be combined easily with Xeryon linear or rotary stages for multi-axis setups.

Our XLS Piezo Linear Stages in Action

Ready to order — or still weighing your options?

Send us your configuration for a formal quote, or your angle, load, speed and resolution targets if you'd like us to spec it. Our motion engineers reply within 1 business day.

Send us your requirements or configuration for a formal quote. Our motion engineers reply within 1 business day.

Request a Quote

Book a Video Call

Why Engineers Choose Xeryon

Nine reasons the XRT-U replaces stacked, geared and electromagnetic axes

PRECISION YOU CAN TRUST

Coarse + fine motion in one

unlimited rotation and 3 µrad steps from a single drive — no stacked stages

Closed-loop control

an optical incremental encoder defines the accuracy, not the drive surface — no drift, no loss over lifetime

Low error motion

precision ball bearings bring it down to 1 µm radial, 0.5 µm axial and 50 µrad wobble, model-dependent

BUILT TO KEEP RUNNING

Maintenance-free

no lubrication, no service intervals

Direct drive, zero backlash

the motor turns the rotor directly — no gears to preload, re-shim or wear into lost motion

Manual override allowed

push the stage by hand without lifetime impact

DROPS INTO YOUR SYSTEM

Zero magnetic field generation

safe for e-beam and sensitive optics

Clear aperture 6.35–25.4 mm

route a beam, fibre or cable straight through the axis of rotation

Low voltage, 48–60 V

no high-voltage amplifier and no safety overhead around the stage

.

At the Heart of Every XRT-U: the Crossfixx™ Ultrasonic Motor

Ultrasonic piezo, not stick-slip

piezo element resonates 80–180 kHz, driving the slider through friction contact.

continuous motion — not discrete jerky steps

preloaded contact = passive holding force when unpowered

closed-loop optical incremental encoder closes the position loop

At the heart of every XRT-U stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element resonating at 80–180 kHz drives the rotor directly through friction contact. No gears, so no backlash and no cogging torque through a revolution, and no travel limit: the XRT-U turns past 360° indefinitely, in either direction, down to 3 µrad increments.

The same preload holds the rotor when power is cut, 9.5 to 90 mNm of passive holding torque, no brake, no heat. Accuracy comes from the optical encoder, not the motor, so it holds over the rated >500 km / 10 million revolutions.

At the heart of every XLS stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element is excited at its resonance frequency (80–180 kHz, far above audible range), causing its tip to trace a microscopic elliptical trajectory. Pressed against the stage slider with a controlled preload, this vibration drives the slider forward in a smooth, continuous motion, fundamentally different from stick-slip (inertia) piezo drives, which advance in discrete jerky steps and are limited to low speeds.

Because the motor drives the slider directly through friction contact, there are no screws, gears or belts: zero backlash, no lubrication, no wear-related accuracy loss. The same preload makes the stage self-locking, when power is removed, the slider holds its position rigidly without generating heat or drift. A high-resolution optical encoder closes the position loop, so accuracy is defined by the encoder, not the motor, and remains stable over the >1000 km lifetime of the stage.

At the heart of every XRT-U stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element resonating at 80–180 kHz drives the rotor directly through friction contact. No gears, so no backlash and no cogging torque through a revolution, and no travel limit: the XRT-U turns past 360° indefinitely, in either direction, down to 3 µrad increments.

The same preload holds the rotor when power is cut, 9.5 to 90 mNm of passive holding torque, no brake, no heat. Accuracy comes from the optical encoder, not the motor, so it holds over the rated >500 km / 10 million revolutions.

World's smallest ultrasonic crossfixx piezo motor

At the heart of every XRT-U stage is the Crossfixx™ ultrasonic piezo motor. A piezoelectric element resonating at 80–180 kHz drives the rotor directly through friction contact. No gears, so no backlash and no cogging torque through a revolution, and no travel limit: the XRT-U turns past 360° indefinitely, in either direction, down to 3 µrad increments.

The same preload holds the rotor when power is cut, 9.5 to 90 mNm of passive holding torque, no brake, no heat. Accuracy comes from the optical encoder, not the motor, so it holds over the rated >500 km / 10 million revolutions.

Choosing a Rotary Stage: How the Technologies Compare

Ultrasonic piezo vs. stick-slip, worm gear, magnetic direct drive and air bearing

Features

Xeryon's ultrasonic piezo: XRT-U

Stick-slip piezo

Worm gear

Magnetic direct drive

Air Bearing

Error motion (wobble)

down to 50 µrad

bearing-dependent

arcsec-level with lapped worm

low, bearing-dependent

good

Size & integration

compact, direct drive

compact

bulky gearbox

larger, more electronics

large, needs air supply

Speed range

0.004–1080°/s

low, duty-cycle limited

low to moderate, ~90°/s typical

high

Hold position (power off)

yes, 9.5–90 mNm self-locking

yes

yes, self-locking

no, needs brake or power

no

Backlash

none — direct drive

none

preload keeps it low; returns as teeth wear

none

Magnetic field generation

none

yes

none

Maintenance

maintenance-free

slip wear over duty cycles

gear wear, re-shimming

low

filtration and air supply

Where each one wins: air bearings are unmatched on error motion, but they are large, costly and dependent on clean compressed air. Worm gears give high torque and self-locking behaviour cheaply and hold off-centre loads well; but they are slow, not back-drivable, and their anti-backlash preload needs re-adjusting as the teeth wear. Magnetic direct drives are the fastest option, at the cost of size, price, standby power and a stray field. Stick-slip piezo is compact and fine-resolution, but the repeated slip limits speed and lifetime under high duty cycles.

The XRT-U sits where those trade-offs meet: the speed of a direct drive with the compactness and holding torque of a piezo stage, no magnetic field, no gearbox and no air supply. If that is the balance your axis needs, configure your stage above; or send us your angle, load and resolution targets and we will size it with you

Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!

Not sure if an ultrasonic piezo rotary drive is right for your application?

Send us your angle, load, speed and resolution targets. Our motion engineers will tell you straight whether the XRT-U fits — and say so if it doesn't.

REQUEST A QUOTE

BOOK A VIDEO CALL

Reply within 1 business day

Where Our Ultrasonic Stages Make the Real Difference

Key Industries and Applications

Semicon

Wafer theta alignment, die bonding & mask alignment in vacuum

Lasers & Spectroscopy

Beam steering, fiber alignment & sample scanning

Quantum Computing

UHV-compatible positioning of qubit optics

metrology

Coordinate measuring machines (CMMs), Multi-Angle Inspection

Made in Europe. Trusted Globally

Xeryon fills a niche we haven’t seen anywhere else. The combination of high dynamics, integrated encoder and holding force in such a lightweight, long-stroke actuator is unmatched. Any alternative would require multiple components and still fall short in accuracy and stability.

Chief Technology Officer

High-throughput tissue engineering company

The speed and precision of Xeryon’s actuators enabled us to significantly improve our microscope design and disrupt the market. Most importantly, it has allowed our customers to accelerate scientific discovery. It’s rare to achieve such a technological leap.

Director of R&D

Fluorescence microscope manufacturer

Our laser systems use a large number of motorized optics. After experiencing quality and delivery issues with our main supplier, we decided to give Xeryon a try. They have proven to be a reliable supplier, and we found their piezo actuators to be much more durable than the ones we used before.

Senior Optomechanical Designer

Ultrafast laser source manufacturer

At first, I found it hard to believe this level of performance could come from such a compact package. Xeryon’s technology was the only solution that made it possible to downsize our design and build the machine our company had envisioned, enabling the next generation of automated test equipment. Their team was also incredibly helpful in answering all of our integration questions.

Principal Mechanical Engineer

Leading semiconductor test equipment manufacturer

Frequently Asked Questions

A piezo rotation stage is a compact motion platform used for precise angular positioning in space-constrained systems. Xeryon's XRT-U is a miniature piezo rotation stage driven by Xeryon's Crossfixx™ ultrasonic motor, combining the precision and compactness of piezo technology with high speed, unlimited rotation and durability.

The XRT-U is designed for fast positioning with microradian precision and can hold its angle when powered off thanks to its self-locking piezo motor. The series is available with different rotor sizes, apertures, encoder resolutions, and optional high-vacuum or ultra-high-vacuum compatibility.

Xeryon's Crossfixx™ ultrasonic piezo motor uses vibration to move a ceramic tip in an elliptical pattern at a very high frequency, between 80 kHz and 180 kHz. The tip is spring-loaded against a ceramic strip inside the stage, generating very small but rapid movements. This results in high-speed rotation, silent operation and long lifetime.

This gives the XRT-U the best of both worlds: lifetime and speed comparable to a direct-drive electromagnetic motor, combined with the precision and compactness of a piezo rotation stage.

Compared with stick-slip or inertia piezo stages, Xeryon's stages are much faster, have a much longer lifetime, operate noiselessly, consume less power, and operate at a much lower voltage at the piezo element — while keeping the precision and compact size you expect from a piezo stage.

Stick-slip stages also work at much lower frequencies, typically within the range of small mechanical components, which can excite unwanted system vibrations. The XRT-U resonates at 80–180 kHz, well above audible range, so operation is silent and vibration-free — and one stage covers both coarse and fine positioning.

Xeryon's piezo rotation stages offer a unique combination of high rotational speed, precision and durability in an ultra-compact design, overcoming the limitations of traditional rotation stages where trade-offs have to be made, such as size or speed. Xeryon's stages are gearless, self-locking, energy-efficient and operate at low voltages. They don't produce a magnetic field, are back-drivable, and are free from drift or play.

Yes. The XRT-U uses a self-locking piezo motor that mechanically holds the stage's angle when it is not powered. The lock comes from the motor's drive mechanism, not from gravity or an electromagnetic brake, so it works with a vertical or horizontal axis of rotation. As a result, heat dissipation is considerably reduced versus motors that need continuous current to hold a load.

Rated holding torque ranges from 9.5 mNm to 90 mNm, depending on the model. For a horizontal axis with an off-centre load, keep the recommended unbalanced load within one third of the specified driving torque.

Yes. Every Xeryon controller ships with a power adapter, USB cable, and a USB stick with the setup software, so a stage is plug-and-play straight out of the box — connect the stage, plug in the controller, and you're moving within minutes.

After purchase, Xeryon's engineering team is available for technical support by ticket, email, or a direct video call with an engineer, backed by a full library of manuals, tuning guides, and support videos in the online Help Center.

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XRT-U Piezo Rotation Stage: Microradian Resolution, Unlimited 360° Rotation

XRT-U Piezo Rotation Stage

XRT-U Piezo Rotation StageMicroradian Resolution,Unlimited 360° Rotation

ENCODER RESOLUTION

Down to 3 µrad

ROTATION RANGE

>360°

SPEED RANGE

Up to 1080°/s

HOLDING TORQUE

Up to 90 mNm

ULTRA COMPACT

From 8.9 mm

LIFETIME

>500 km

PIEZO ROTATION STAGES

One drive does what normally takes three components

1080°/s vs. worm-gear rotation stages

0 W vs. magnetic direct drives

Zero backlash vs. any geared stage

Introducing XRT-U-35

Build your Piezo Rotation Stage

Full Specification

Motion Performance (closed-loop)

Encoder resolutions — Gen 1

Encoder resolutions — Gen 2

Encoder

Minimum incremental motion

Bidirectional repeatability

Maximum speed

Minimum speed

Min speed

Speed stability

Point-to-point positioning time

Error motion

Mechanical & Environmental

Driving torque

Holding torque

Rotation range

Rotor diameter

Clear aperture

Dimensions (L × W × H)

Mass

Payload limitation

Lifetime

Temperature range

Vacuum versions

Heat dissipation while moving

Technical Resource Hub

Ready to order — or still weighing your options?

Why Engineers Choose Xeryon

PRECISION YOU CAN TRUST

BUILT TO KEEP RUNNING

DROPS INTO YOUR SYSTEM

At the Heart of Every XRT-U: the Crossfixx™ Ultrasonic Motor

Choosing a Rotary Stage: How the Technologies Compare

Not sure if an ultrasonic piezo rotary drive is right for your application?

Where Our Ultrasonic Stages Make the Real Difference

Semicon

Lasers & Spectroscopy

Quantum Computing

metrology

Made in Europe. Trusted Globally

Frequently Asked Questions

Can't find what you're looking for?

Related Products

XRT-U Piezo Rotation Stage
Microradian Resolution,
Unlimited 360° Rotation

1080°/s
vs. worm-gear rotation stages

0 W
vs. magnetic direct drives

Zero backlash
vs. any geared stage