Vacuum compatible stages (HV & UHV)
Vacuum compatible stages with nanometer / μrad precision. Linear & rotary.
Compact, durable, fast, noiseless and low operating voltages. Easy to install, easy to operate.
Lead time just 1 - 2 weeks for most products. Evaluation kits available for all of our products.
Vacuum stages by Xeryon
Xeryon provides a variety of vacuum compatible stages in multiple sizes, equipped with numerous optional features. We offer both vacuum compatible linear stages and vacuum compatible rotation stages, as well as multi-axis systems. Our stages are driven by our patented ultrasonic piezo motors.
Our vacuum stages are available in both high vacuum (HV) and ultra high vacuum (UHV) configurations. We also offer several vacuum feedthrough flanges, including D-Sub 15-pin (standard), Fischer 12-pin and Lemo 12-pin.
Installation and operation of our vacuum compatible stages is straightforward. Simply connect the stage to the controller, and position it using our user-friendly software or through our independent manual controls.
Xeryon's vacuum linear stages range from a resolution of 1.25 µm to an ultra-fine 1 nm. Our vacuum rotation stages are available with resolutions between 109 and 3 µrad.
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