Linear piezo stages | XLS
Compact, fast, precise & durable
This is the XLS series. These piezo linear stages are driven by our Crossfixx™ ultrasonic motor, giving you amazing durability and speed, with the precision and compactness of a piezo system.
All of our stages can easily be combined into a multi-axis setup and are available as non-magnetic or vacuum-compatible versions. Enjoy!
Only 1 - 2 weeks lead time for most products.
Compact & precise linear stage
Compact
Starting at a mass of less than 40 grams
Precise
Resolutions between 1.25 µm and 1 nm (open loop also available)
Fast
Up to 200 mm/s in closed-loop, 1000 mm/s open-loop (minimum: 1 µm/s)
Durable
Lifetime > 1000 km or 20 million cycles
Actual speed. As you can see, this is not your average piezo stage. How it works.
Large volumes or custom designs? Explore our OEM solutions
Quick
Stroke frequency up to 50 Hz
Smooth
1N, 3N and 5N direct-drive ultrasonic piezo motors
Strong
Load capacity up to 2000 grams
Versatile:
Non-magnetic and vacuum-compatible versions available
Compatible:
One-to-one interchangeability with other stage brands
Select your linear piezo stage
Driving force
*3N and 5N motors not available for the 30 mm variant
Stage length
= Travel range:
27 - 92 mm
Encoder resolution
HV / UHV vacuum - optional ⓘ
Short cage - optional ⓘ
Non magnetic - optional ⓘ
Dimensions:
30 - 120 x 34 x 13 mm
Product code:
XLS-1-40-1250
Prices depend on precision level, length, force and optional features.
Most linear stages cost between $1000 and $1600 per axis.
Most controllers between $800 (single-axis) and $2600 (multi-axis benchtop model).
XYZ setup including controller starts at $6500.
All of our stages can easily be combined into multi-axis systems (linear & rotary)
Compact, precise & fast
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Coarse & fine positioning in one
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No wear-induced play (no loss of accuracy over time)
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Maintenance free
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No magnetic field generation
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Direct-drive, no bulky gears or other transmission components
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Back-driveable (manually overridable without affecting lifetime)
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Low & safe voltage (<48V)
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Low power consumption
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Capable of slow and constant scanning speeds
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Optional extreme precision guideways available upon request
Technical details
Xeryon stages are modular, allowing for easy multi-axis configurations
Product videos
Ultrasonic linear piezo stage | XLS
The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. This allows for fast positioning with submicron precision. The self-locking piezo motor holds the position of the stage when it is not powered. As a result, heat dissipation is considerably reduced.
Not familiar with ultrasonic piezo technology? Have a look at our evaluation kits, the perfect way to experiment with our products!
The XLS is the fastest linear stage of such a small size in the world.
Optional guideways for extreme precision are available upon request for increased straightness, flatness, pitch, yaw & roll performance.
Not what you're looking for? We also design custom stages for your specific product. Contact us to talk about a custom stage design.
Coarse + fine positioning in one
It is not uncommon within the world of precision motion to use two stages for reaching one final position. In such cases, a typical setup may contain an electromagnetic stage for the initial coarse (rough) positioning, with a second stage (typically piezo-driven) mounted on top of it for fine, submicron adjustments. This typically involves having to buy multiple controllers as well.
With Xeryon's linear stages, this is a thing of the past. The combination of a long travel range and nanometer precision allows the entire process to be completed with a single stage.
This results in greatly reduced design complexity, size, costs and an increase in ease of use.
Why buy two stages if one can do the job?
Frequently asked questions
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